Electrothermal microcantilever with integrated solid-state heater-thermometer and npn back-to-back diodes

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2010, Pages 94-95

  Fletcher, Patrick C ^a   Bhatia, Bikram S ^a   Wu, Yan ^a   Shannon, Mark A ^a   King, William P ^a  

^a United States of America   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; MICROSYSTEMS; NANOCANTILEVERS; TEMPERATURE SENSORS; THERMOMETERS;

ATOMIC FORCE MICROSCOPE CANTILEVERS; MICRO-CANTILEVERS; THERMAL ELEMENTS;

SOLID-STATE SENSORS;

EID: 79958014615     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. J. Lee, T. Beechem, T. L. Wright et al., JMEMS, vol. 15, pp. 1644-1655, Dec, 2006.
2. P. Vettiger, et al., "The "millipede"-Nanotechnology entering data storage," IEEE Transactions on Nanotechnology, vol. 1, pp. 39-55, Mar 2002.
3. W. K. Lee, et al., "Maskless Nanoscale Writing of Nanoparticle−Polymer Composites and Nanoparticle Assemblies using Thermal Nanoprobes," Nano Letters, vol. 10, pp. 129-133, 2009.
4. J. Lee, et al., "Electrical and Thermal Coupling to a Single-Wall Carbon Nanotube Device Using an Electrothermal Nanoprobe," Nano Letters, vol. 9, pp. 1356-1361, 2009.