Scanning probe microscope lithography at the micro- and nano-scales

Journal of Nanoscience and Nanotechnology

Volumn 10, Issue 7, 2010, Pages 4486-4494

  Shirakashi, Jun Ichi ^a  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

Author keywords

Canning Probe Microscopy; Groove; Local Oxidation; Oxide; Scratch; Si

Indexed keywords

GROOVE; LOCAL OXIDATION; PROBE MICROSCOPY; SCRATCH; SI;

LITHOGRAPHY; MICROMETERS; PROBES; SCANNING PROBE MICROSCOPY; SILICON;

OXIDATION;

EID: 79955420689     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2010.2359     Document Type: Conference Paper

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