SPM local oxidation nanolithography with active control of cantilever dynamics

Journal of Physics: Conference Series

Volumn 61, Issue 1, 2007, Pages 1066-1070

  Nishimura, S ^a   Takemura, Y ^b   Shirakashi, J ^a  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

^b YOKOHAMA NATIONAL UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 34247489793     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/61/1/211     Document Type: Article

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