Nanomachining of silicon surface using atomic force microscope with diamond tip

Journal of Manufacturing Science and Engineering

Volumn 128, Issue 3, 2006, Pages 723-729

  Kawasegi, Noritaka ^a   Takano, Noboru ^a   Oka, Daisuke ^a   Morita, Noboru ^a   Yamada, Shigeru ^a   Kanda, Kazutaka ^b   Takano, Shigeto ^b   Obata, Tsutomu ^c   Ashida, Kiwamu ^d  

^a UNIVERSITY OF TOYAMA   (Japan)

^b KANAZAWA UNIVERSITY   (Japan)

^c TOYAMA INDUSTRIAL TECHNOLOGY CENTER   (Japan)

^d NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Atomic force microscope; Cantilever; Nanomachining; Single crystal silicon

Indexed keywords

ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; CHEMICAL VAPOR DEPOSITION; DIAMONDS; MACHINE DESIGN; MACHINING; PHOTOLITHOGRAPHY; SINGLE CRYSTALS; SURFACE PHENOMENA; WEAR RESISTANCE;

NANOMACHINING; NANOMETERS; PYRAMIDAL DIAMOND TIP; SINELE-CRYSTAL SILICON;

SILICON;

EID: 33746882479     PISSN: 10871357     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2163364     Document Type: Article

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