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Volumn 36, Issue 8 SUPPL. B, 1997, Pages
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Nb/Nb oxide-bsed planar-type metal/insulator/metal (MIM) diodes fabricated by atomic force microscope (AFM) nano-oxidation process
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Author keywords
Anodization; Atomic force microscope (AFM); Metal insulator metal (MIM) diode; Nb oxide; Niobium (Nb); Surface modification
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Indexed keywords
ANODIC OXIDATION;
ATOMIC FORCE MICROSCOPY;
CURRENT VOLTAGE CHARACTERISTICS;
MIM DEVICES;
NANOTECHNOLOGY;
NIOBIUM COMPOUNDS;
PERMITTIVITY;
SEMICONDUCTOR DEVICE MANUFACTURE;
SEMICONDUCTOR JUNCTIONS;
SURFACE TREATMENT;
THERMAL EFFECTS;
NIOBIUM OXIDE;
SEMICONDUCTOR DIODES;
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EID: 0031208392
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.36.l1120 Document Type: Article |
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Times cited : (24)
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References (11)
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