Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 12 B, 1999, Pages 7257-7259

  Hyon, Chan Kyeong ^a   Choi, Seung Chul ^a   Hwang, Sung Woo ^a,b   Ahn, Doyeol ^b   Kim, Yong ^c   Kim, Eun Kyu ^c  

^a Korea University   (South Korea)

^b University of Seoul   (South Korea)

^c Korea Institute of Science and Technology   (South Korea)

Author keywords

AFM; Cantilever oscillation; Nano structure; Scanning probe lithography; Voltage modulation

Indexed keywords

ATOMIC FORCE MICROSCOPY; PHOTOLITHOGRAPHY;

CANTILEVER OSCILLATION; SCANNING PROBE LITHOGRAPHY; VOLTAGE MODULATION;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0033315311     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.7257     Document Type: Article

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