Tapping mode SPM local oxidation nanolithography ⋯mellip; with sub-10 nm resolution

Journal of Physics: Conference Series

Volumn 100, Issue PART 5, 2008, Pages

  Nishimura, S ^a   Ogino, T ^a   Takemura, Y ^b   Shirakashi, J ^a  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

^b YOKOHAMA NATIONAL UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

NANOCANTILEVERS; NANOLITHOGRAPHY;

APPLIED BIAS VOLTAGE; CANTILEVER OSCILLATION; LOCAL OXIDATION; MODEL-BASED OPC; OSCILLATION AMPLITUDE; OXIDATION CONDITIONS; OXIDATION TIME; TAPPING-MODE OPERATIONS;

OXIDATION;

EID: 64549102968     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/100/5/052021     Document Type: Conference Paper

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