Markers prepared by focus ion beam technique for nanopositioning procedures

Microelectronic Engineering

Volumn 84, Issue 3, 2007, Pages 524-527

  Romanus, H ^a   Schadewald, J ^a   Cimalla, V ^a   Niebelschutz M ^a   Machleidt, T ^a   Franke, K H ^a   Spiess, L ^a   Ambacher, O ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; NANOSTRUCTURED MATERIALS; PATTERN RECOGNITION; PLATINUM; SURFACE PHENOMENA;

COORDINATE SYSTEMS; FOCUS ION BEAM (FIB) TECHNIQUE; HIERARCHIC PATTERNS; NANOPOSITIONING PROCEDURES;

ION BEAMS;

EID: 33846930319     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.10.076     Document Type: Article

References (4)

1. Cimalla V., and Zekentes K. Mater. Sci. Forum 389-393 (2002) 747-750
2. Sennhauser U., Jacob P., and Gasser P. Prakt. Metallogr. 41 4 (2004) 199-209
3. E. Roth, PhD-thesis, Friedrich-Schiller-Universität Jena, 1993.
4. Machleidt T., Kästner K., and Franke K.-H. In: Wilkening G., and Koenders L. (Eds). Proc. Nanoscale 2004 (2005), Wiley-VCH