High throughput nanofabrication of silicon nanowire and carbon nanotube tips on AFM probes by stencil-deposited catalysts

Nano Letters

Volumn 11, Issue 4, 2011, Pages 1568-1574

  Engstrom, Daniel S ^a   Savu, Veronica ^b   Zhu, Xueni ^c   Bu, Ian Y Y ^d   Milne, William I ^c   Brugger, Juergen ^b   Boggild, Peter ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b EPFL   (Switzerland)

^c UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^d NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

Author keywords

AFM; carbon nanotubes; high aspect ratio; Nanostencil; silicon nanowires

Indexed keywords

AFM; AFM PROBE; ATOMIC FORCE MICROSCOPES; CARBON NANOTUBE TIP; CATALYST MATERIAL; CHEMICAL VAPOR; COST-EFFICIENT; DEEP TRENCH; HIGH ASPECT RATIO; HIGH THROUGHPUT; HIGH-ASPECT-RATIO TIPS; NANOFABRICATION; NANOSTENCILS; SILICON NANOWIRES; VAPOR-LIQUID-SOLID PROCESS; WAFER SCALE; WAFER SCALE MANUFACTURING;

ASPECT RATIO; ATOMIC FORCE MICROSCOPY; CARBON NANOTUBES; CATALYSTS; CHEMICAL VAPOR DEPOSITION; NANOWIRES; PROBES; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; VAPORS;

MULTIWALLED CARBON NANOTUBES (MWCN);

CARBON NANOTUBE; SILICON;

ARTICLE; ATOMIC FORCE MICROSCOPY; CATALYSIS; CHEMISTRY; CONFORMATION; CRYSTALLIZATION; EQUIPMENT; EQUIPMENT DESIGN; GENETIC PROCEDURES; INSTRUMENTATION; MACROMOLECULE; MATERIALS TESTING; METHODOLOGY; PARTICLE SIZE; SURFACE PROPERTY; ULTRASTRUCTURE;

CATALYSIS; CRYSTALLIZATION; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MACROMOLECULAR SUBSTANCES; MATERIALS TESTING; MICROSCOPY, ATOMIC FORCE; MOLECULAR CONFORMATION; MOLECULAR PROBE TECHNIQUES; NANOTUBES, CARBON; PARTICLE SIZE; SILICON; SURFACE PROPERTIES;

EID: 79954464406     PISSN: 15306984     EISSN: 15306992     Source Type: Journal    
DOI: 10.1021/nl104384b     Document Type: Article

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