Carbon nanotube tips for scanning probe microscopy: Fabrication and high aspect ratio nanometrology

Measurement Science and Technology

Volumn 16, Issue 11, 2005, Pages 2138-2146

  Nguyen, Cattien V ^a   Ye, Qi ^a   Meyyappan, M ^a  

^a NASA AMES RESEARCH CENTER   (United States)

Author keywords

Atomic force microscopy; Carbon nanotube tips; Chemical vapour deposition; Imaging high aspect ratio features; Wafer scale fabrication

Indexed keywords

ASPECT RATIO; ATOMIC FORCE MICROSCOPY; INFORMATION ANALYSIS; MEASUREMENTS; NANOTECHNOLOGY; SCANNING; SCANNING ELECTRON MICROSCOPY;

CARBON NANOTUBE TIPS; IMAGING HIGH ASPECT RATIO FEATURES; WAFER SCALE FABRICATION;

CARBON NANOTUBES;

ATOMIC FORCE MICROSCOPY; NANOTUBE;

EID: 27344459104     PISSN: 09570233     EISSN: 09570233     Source Type: Journal    
DOI: 10.1088/0957-0233/16/11/003     Document Type: Article

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