Wafer scale production of carbon nanotube scanning probe tips for atomic force microscopy

Applied Physics Letters

Volumn 80, Issue 12, 2002, Pages 2225-2227

  Yenilmez, Erhan ^a   Wang, Qian ^a   Chen, Robert J ^a   Wang, Dunwei ^a   Dai, Hongjie ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NANO-SCALE IMAGING; NANOTUBE PROBES; PATTERNING TECHNIQUES; SCALE-UP; SCANNING PROBE LITHOGRAPHY; SCANNING PROBES; WAFER SCALE; WAFER SCALE FABRICATION;

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

SINGLE-WALLED CARBON NANOTUBES (SWCN);

EID: 79956011133     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1464227     Document Type: Article

References (15)

1. H. Dai, J. Hafner, A. Rinzler, D. Colbert, and R. Smalley, Nature (London) 384, 147 (1996). nat NATUAS 0028-0836
2. S. Wong, E. Joselevich, A. Woolley, C. Cheung, and C. Lieber, Nature (London) 394, 52 (1998). nat NATUAS 0028-0836
3. S. Wong, J. Harper, P. Lansbury, and C. M. Lieber, J. Am. Chem. Soc. 120, 603 (1998). acs JACSAT 0002-7863
4. H. Dai, N. Franklin, and J. Han, Appl. Phys. Lett. 73, 1508 (1998). apl APPLAB 0003-6951
5. S. Wong, A. Wooley, E. Joselevich, and C. Lieber, Chem. Phys. Lett. 306, 219 (1999). cph CHPLBC 0009-2614
6. S. Wong, A. Woolley, E. Joselevich, C. Cheung, and C. Lieber, J. Am. Chem. Soc. 120, 8557 (1998). acs JACSAT 0002-7863
7. J. Hafner, C. Cheung, and C. Lieber, Nature (London) 398, 761 (1999). nat NATUAS 0028-0836
8. J. Hafner, C. Cheung, and C. M. Lieber, J. Am. Chem. Soc. 121, 9750 (1999). acs JACSAT 0002-7863
9. E. B. Cooper, S. R. Manalis, H. Fang, H. Dai, K. Matsumoto, S. C. Minne, T. Hunt, and C. F. Quate, Appl. Phys. Lett. 75, 3566 (1999). apl APPLAB 0003-6951
10. H. Nishijima, S. Kamo, S. Akita, Y. Nakayama, K. Hohmura, S. Yoshimura, and K. Takeyasu, Appl. Phys. Lett. 74, 4061 (1999). apl APPLAB 0003-6951
11. J. Yamashita, H. Hirayama, Y. Ohshima, and K. Takayanagi, Appl. Phys. Lett. 74, 2450 (1999). apl APPLAB 0003-6951
12. J. Hafner, C. Cheung, T. Oosterkamp, and C. Lieber, J. Phys. Chem. 105, 743 (2001). afh JPCAFH 1089-5639
13. J. Kong, H. Soh, A. Cassell, C. F. Quate, and H. Dai, Nature (London) 395, 878 (1998). nat NATUAS 0028-0836
14. N. Franklin, Y. Li, R. J. Chen, A. Javey, and H. Dai, Appl. Phys. Lett. 79, 4571 (2001). apl APPLAB 0003-6951
15. Y. Li, W. Kim, Y. Zhang, M. Rolandi, D. Wang, and H. Dai, J. Phys. Chem. 105, 11424 (2001). afh JPCAFH 1089-5639