Self-assembled monolayer-immobilized gold nanoparticles as durable, anti-stiction coatings for MEMS

Journal of Microelectromechanical Systems

Volumn 20, Issue 2, 2011, Pages 424-435

  Hurst, Kendall M ^a   Ansari, Naveed ^a   Roberts, Christopher B ^a   Ashurst, W Robert ^a  

^a AUBURN UNIVERSITY   (United States)

Author keywords

Coatings; microelectromechanical devices; nanoparticles; reliability; surface roughness; thin films

Indexed keywords

3-MERCAPTOPROPYL TRIMETHOXYSILANE; ADHESION ENERGY; ANTI-STICTION COATING; ENERGY SURFACE; GOLD NANOPARTICLE; GOLD NANOPARTICLES; IN-PLANE; MECHANICAL CONTACT; METALLIC NANOPARTICLES; MICROSTRUCTURED SURFACES; NANOPARTICLE COATINGS; NATIVE OXIDES; ORDERS OF MAGNITUDE; SELF-ASSEMBLED MONOLAYER FILMS; SEM; SEM ANALYSIS; SI(1 0 0); SILICON SUBSTRATES; SILICON-BASED MICRODEVICES; TERMINAL GROUPS; TRIMETHOXYSILANE; WATER EROSION; WORK OF ADHESION;

ADHESION; COATINGS; ELECTRON ENERGY LEVELS; GOLD; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; NANOPARTICLES; SCANNING ELECTRON MICROSCOPY; SELF ASSEMBLED MONOLAYERS; SURFACE PROPERTIES; SURFACE ROUGHNESS; THIN FILMS;

GOLD COATINGS;

EID: 79953741587     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2112334     Document Type: Article

References (65)

1. K. Komvopoulos, "Surface engineering and microtribology for mi-croelectromechanical systems," Wear, vol. 20, no. 1/2, pp. 305-327, Dec. 1996.
2. N. Tas, T. Sonnenberg, H. Jansen, R. Legtenberg, and M. Elwenspoek, "Stiction in surface micromachining," J. Micromech. Microeng., vol. 6, no. 4, pp. 385-397, Dec. 1996. (Pubitemid 126547728)
3. R. Maboudian, W. R. Ashurst, and C. Carraro, "Tribological challenges in micromechanical systems," Tribol. Lett., vol. 12, no. 2, pp. 95-100, Feb. 2002. (Pubitemid 41450881)
4. R. Maboudian and R. T. Howe, "Critical review: Adhesion in surface mi-cromechanical structures," J. Vac. Sci. Technol. B, Microelectron. Process. Phenom., vol. 15, no. 1, pp. 1-20, Jan. 1997. (Pubitemid 127574161)
5. Z. Rymuza, "Control tribological and mechanical properties of MEMS surfaces. Part 1: Critical review," Microsyst. Technol., vol. 5, no. 4, pp. 173-180, Jul. 1999. (Pubitemid 129555630)
6. J. Frechette, R. Maboudian, and C. Carraro, "Effect of temperature on in-use stiction of cantilever beams coated with perfluorinated alkysiloxane monolayers," J. Microelectromech. Syst., vol. 15, no. 4, pp. 737-744, Aug. 2006. (Pubitemid 44251380)
7. H. Guckel, J. J. Sniegowski, T. R. Christenson, S. Mohney, and T. F. Kelly, "Fabrication of micromechanical devices from polysilicon films with smooth surfaces," Sens. Actuators, vol. 20, no. 1/2, pp. 117-122, Nov. 1989. (Pubitemid 20638059)
8. R. Legtenberg, H. A. C. Tillmans, J. Elders, and M. Elwenspoek, "Stiction of surface micromachined structures after rinsing and drying: Model and investigation of adhesion mechanisms," Sens. Actuators A, Phys., vol. 43, no. 1-3, pp. 230-238, May 1994.
9. U. Srinivasan, M. R. Houston, R. T. Howe, and R. Maboudian, "Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines," J. Microelectromech. Syst., vol. 7, no. 2, pp. 252-260, Jun. 1998.
10. L. S. Fan, Y. C. Tai, and R. S. Muller, "IC-processed electrostatic micromotors," Sens. Actuators, vol. 20, no. 1/2, pp. 41-47, Nov. 1989.
11. R. L. Alley, P. Mai, K. Komvopoulos, and R. T. Howe, "Surface roughness modification of interfacial contacts in polysilicon microstructures," in Proc. 7th Int. Conf. Solid-State Sens., Actuators, Microsyst., Yokohama, Japan, 1993, pp. 288-291.
12. M. R. Houston, R. Maboudian, and R. T. Howe, "Ammonium fluoride anti-stiction treatments for polysilicon microstructures," in Proc. 8th Int. Conf. Solid-State Sens., Actuators, Microsyst., Stockholm, Sweeden, 1995, pp. 42-47.
13. Y. Yee, K. Chun, J. D. Lee, and C. J. Kim, "Polysilicon surface-modification technique to reduce sticking of microstructures," Sens. Actuators A, Phys., vol. 52, no. 1-3, pp. 145-150, Mar./Apr. 1996. (Pubitemid 126346961)
14. R. Maboudian and C. Carraro, "Surface chemistry and tribology of MEMS," Annu. Rev. Phys. Chem., vol. 55, pp. 35-54, Jun. 2004.
15. C. H. Mastrangelo, "Adhesion-related failure mechanisms in microme-chanical devices," Tribol. Lett., vol. 3, no. 3, pp. 223-238, Sep. 1997. (Pubitemid 127505585)
16. W. R. Ashurst, C. Yau, C. Carraro, R. Maboudian, and M. T. Dugger, "Dichlorodimethyl-silane as an anti-stiction monolayer for MEMS: A comparison to the octadecyl-trichlorosilane self-assembled monolayer," J. Microelectromech. Syst., vol. 10, no. 1, pp. 41-49, Mar. 2001. (Pubitemid 32287839)
17. W. R. Ashurst, C. Yau, C. Carraro, C. Lee, G. J. Kluth, R. T. Howe, and R. Mabouidian, "Alkene based monolayer films as anti-stiction coatings for polysilicon MEMS," Sens. Actuators A, Phys., vol. 91, no. 3, pp. 239-248, Jul. 2001.
18. S. A. Henck, "Lubrication of digital micromirror devices," Tribol. Lett., vol. 3, no. 3, pp. 239-247, 1997. (Pubitemid 27456945)
19. H. Min, J.-W. Park, H. K. Shon, D. W. Moon, and T. G. Lee, "ToF-SIMS study on the cleaning methods of Au surface and their effects on the reproducibility of self-assembled monolayers," Appl. Surf. Sci., vol. 255, no. 4, pp. 1025-1028, Dec. 2008.
20. H. Fukushima, S. Seki, T. Nishikawa, H. Takiguchi, K. Tamada, K. Abe, R. Colorado, M. Graupe, O. E. Shmakova, and T. R. Lee, "Microstructure, wettability, and thermal stability of semifluorinated self-assembled monolayers (SAMs) on gold," J. Phys. Chem., ser. B, vol. 104, no. 31, pp. 7417-7423, Aug. 2000.
21. E. Delamarche, B. Michel, H. Kang, and C. Gerber, "Thermal stability of self-assembled monolayers," Langmuir, vol. 10, no. 11, pp. 4103-4108, Nov. 1994.
22. F. W. DelRio, M. L. Dunn, B. L. Boyce, A. D. Corwin, and M. P. de Boer, "The effect of nanoparticles on rough surface adhesion," J. Appl. Phys., vol. 99, no. 10, p. 104 304, May 2006.
23. K. M. Hurst, C. B. Roberts, and W. R. Ashurst, "A gas-expanded liquid nanoparticle deposition technique for reducing adhesion of silicon mi-crostructures," Nanotechnology, vol. 20, no. 18, p. 185 303, May 2009.
24. A. T. Almeida, M. C. Salvadori, and D. F. S. Petri, "Enolase adsorption onto hydrophobic and hydrophilic solid substrates," Langmuir, vol. 18, no. 18, pp. 6914-6920, Sep. 2002. (Pubitemid 35383248)
25. M. Tanigawa and T. Okada, "Atomic force microscopy of supercoiled DNA structure on mica," Anal. Chem. Acta, vol. 365, no. 1-3, pp. 19-25, Jun. 1998. (Pubitemid 28254726)
26. H. Sugimura and N. Nakagiri, "Nanoscopic surface architecture based on scanning probe electrochemistry and molecular self-assembly," J. Amer. Chem. Soc., vol. 119, no. 39, pp. 9226-9229, Oct. 1997. (Pubitemid 27440500)
27. Q. Li, J. Zheng, and Z. Liu, "Site-selective assemblies of gold nanoparti-cles on an AFM tip-defined silicon template," Langmuir, vol. 19, no. 1, pp. 166-171, Jan. 2003.
28. K. C. Grabar, K. J. Allison, B. E. Baker, R. M. Bright, K. R. Brown, R. G. Freeman, A. P. Fox, C. D. Keating, M. D. Musick, and M. J. Natan, "Two-dimensional arrays of colloidal gold particles: A flexible approach to macroscopic metal surfaces," Langmuir, vol. 12, no. 10, pp. 2353-2361, May 1996. (Pubitemid 126567782)
29. K. C. Grabar, P. C. Smith, M. D. Musick, J. A. Davis, D. G. Walter, M. A. Jackson, A. P. Guthrie, and M. J. Natan, "Kinetic control of interparticle spacing in Au colloid-based surfaces: Rational nanometer-scale architecture," J. Amer. Chem. Soc., vol. 118, no. 5, pp. 1148-1153, Feb. 1996. (Pubitemid 26074358)
30. J. A. Harnisch, A. D. Pris, and M. D. Porter, "Attachment of gold nanopar-ticles to glassy carbon electrodes via a mercaptobenzene film," J. Amer. Chem. Soc., vol. 123, no. 24, pp. 5829-5830, Jun. 2001. (Pubitemid 32904729)
31. O. Seitz, M. M. Chehimi, E. Cabet-Deliry, S. Truong, N. Felidj, C. Perruchot, S. J. Greaves, and J. F. Watts, "Preparation and characterization of gold nanoparticle assemblies on silanised glass plates," Colloids Surf., ser. A, vol. 218, no. 1-3, pp. 225-239, May 2003. (Pubitemid 36597898)
32. V. L. Colvin, A. N. Goldstein, and A. P. Alivisatos, Semiconductor nanocrystals covalently bound to metal surfaces with self-assembled monolayers," J. Amer. Chem. Soc., vol. 114, no 13,pp 5221-5230, Jun. 1992.
33. I. U. Vakarelski, C. E. McNamee, and K. Higashitani, "Deposition of silica nanoparticles on a gold surface via a self-assembled monolayer of (3-mercaptopropyl)trimethoxysilane," Colloids Surf., ser. A, vol. 295, no. 1-3, pp. 16-20, Mar. 2007. (Pubitemid 46187001)
34. M. B. Ali, F. Bessueille, J. M. Chovelon, A. Abdelghani, N. Jaffrezic-Renault, M. A. Maaref, and C. Martelet, "Use of ultra-thin organic silane films for the improvement of gold adhesion to the silicon dioxide wafers for (bio)sensor applications," Mater. Sci. Eng., ser. C, vol. 28, no. 5/6, pp. 628-632, Jul. 2008. (Pubitemid 351621925)
35. A. Kaminska, I.-A. Obianuju, R. J. Forster, and T. E. Keyes, "Chemically bound gold nanoparticle arrays on silicon: Assembly, properties and SERS study of protein interactions," Phys. Chem. Chem. Phys., vol. 10, no. 28, pp. 4172-4180, Jul. 2008.
36. J. Wang, T. Zhu, J. Song, and Z. Liu, "Gold nanoparticulate film bound to silicon surface with self-assembled monolayers," Thin Solid Films, vol. 327-329, pp. 591-594, Aug. 1998. (Pubitemid 128635740)
37. L. Xu, J. Liao, L. Huang, D. Ou, Z. Guo, H. Zhang, C. Ge, N. Gu, and J. Liu, "Surface-bound nanoparticles for initiating metal deposition," Thin Solid Films, vol. 434, no. 1/2, pp. 121-125, Jun. 2003.
38. X. Y. Ling, L. Malaquin, D. N. Reinhoudt, H. Wolf, and J. Huskens, "An in situ study of the adsorption behavior of functionalized particles on self-assembled monolayers via different chemical interactions," Langmuir, vol. 23, no. 20, pp. 9990-9999, Sep. 2007. (Pubitemid 47548478)
39. S. Heid, F. Effenberger, K. Bierbaum, and M. Grunze, "Self-assembled mono-and multilayers of terminally functionlized organosilyl compounds on silicon substrates," Langmuir, vol. 12, no. 8, pp. 2118-2120, 1996. (Pubitemid 126582963)
40. F. Zhang and M. P. Srinivasan, "Self-assembled molecular films of aminosilanes and their immobilization capacities," Langmuir, vol. 20, no. 6, pp. 2309-2314, Mar. 2004.
41. J. J. Sniegowski and M. P. de Boer, "IC-compatible polysilicon surface micromachining," Annu. Rev. Mater. Sci., vol. 30, pp. 299-333, Aug. 2000.
42. L. T. Zhuravlev, "Concentration of hydroxyl groups on the surface of amorphous silicas," Langmuir, vol. 3, no. 3, pp. 316-318, May 1987.
43. P. Laoharojanaphand, T. J. Lin, and J. O. Stoffer, "Glow discharge polymerization of reactive functional silanes on poly(methyl methacrylate)," J. Appl. Polym. Sci., vol. 40, no. 3/4, pp. 369-384, Aug. 1990. (Pubitemid 20695231)
44. C. A. Goss, D. H. Charych, and M. Majda, "Application of (3-mercaptopropyl) trimethoxysilane as a molecular adhesive in the fabrication of vapor-deposited gold electrodes on glass substrates," Anal. Chem., vol. 63, no. 1, pp. 85-88, Jan. 1991.
45. M. B. Sigman, A. E. Saunders, and B. A. Korgel, "Metal nanocrystal superlattice nucleation and growth," Langmuir, vol. 20, no. 3, pp. 978-983, Feb. 2004.
46. J. Liu, Z. Qin, G. Wang, X. Hou, and J. Wang, "Critical properties of binary and ternary mixtures of hexane + methanol, hexane + carbon dioxide, methanol + carbon dioxide, and hexane + carbon dioxide + methanol," J. Chem. Eng. Data, vol. 48, no. 6, pp. 1610-1613, Nov. 2003.
47. K. M. Hurst, C. B. Roberts, and W. R. Ashurst, "A new method to determine adhesion of cantilever beams using beam height experimental data," Tribol. Lett., vol. 35, no. 1, pp. 9-15, Jul. 2009.
48. C. Boulas, J. V. Davidovits, F. Rondelez, and D. Vuillaume, "Suppression of charge carrier tunneling through organic self-assembled monolayers," Phys. Rev. Lett., vol. 76, no. 25, pp. 4797-4800, Jun. 1996. (Pubitemid 126640459)
49. T. Ishizaki, N. Saito, Y. Sato, and O. Takai, "Probing into adsorption behavior of human plasma fibrinogen on self-assembled monolayers with different chemical properties by scanning probe microscopy," Surf. Sci., vol. 601, no. 18, pp. 3861-3865, Sep. 2007. (Pubitemid 47422273)
50. R. Yakimova, R. M. Petoral, G. R. Yazdi, C. Vahlberg, A. L. Spetz, and K. Uvdal, "Surface functionalization and biomedical applications based on SiC," J. Phys. D, Appl. Phys., vol. 40, no. 20, pp. 6435-6442, Oct. 2007. (Pubitemid 350093024)
51. A. B. Sieval, R. Linke, G. Heij, G. Meijer, H. Zuilhof, and E. J. R. Sudholter, "Amino-terminated organic monolayers on hydrogen-terminated silicon surfaces," Langmuir, vol. 17, no. 24, pp. 7554-7559, Nov. 2001. (Pubitemid 35330991)
52. D. K. Aswal, S. Lenfant, D. Guerin, J. V. Yakhmi, and D. Vuillaume, "Fowler-Nordheim tunneling and electrically stressed breakdown of 3-mercaptopropyltrimethoxysilane self-assembled monolayers," Nano-technology, vol. 16, no. 12, pp. 3064-3068, Dec. 2005. (Pubitemid 41677075)
53. A. Anderson and W. R. Ashurst, "Investigation of the ability of a silica 'seed' layer to improve the thermal and aqueous immersion stability of alkylsilane monolayers on silicon oxide surfaces," Thin Solid Films, vol. 516, no. 21, pp. 7538-7546, Sep. 2008.
54. T. Onda, S. Shibuichi, N. Satoh, and K. Tsujii, "Super-water- repellent fractal surfaces," Langmuir, vol. 12, no. 9, pp. 2125-2127, May 1996.
55. J. Bico, U. Thiele, and D. Quere, "Wetting of textured surfaces," Colloids Surf., ser. A, vol. 206, no. 1-3, pp. 41-46, Jul. 2002. (Pubitemid 34628538)
56. C. T. Hsieh, J.-M. Chen, R.-R. Kuo, T.-S. Lin, and C.-F. Wu, "Influence of surface roughness on water-and oil-repellent surfaces coated with nanoparticles," Appl. Surf. Sci., vol. 240, no. 1-4, pp. 318-326, Feb. 2005.
57. A. B. D. Cassie and S. Baxter, "Wettability of porous surfaces," Trans. Faraday Soc., vol. 40, pp. 546-551, 1944.
58. R. Wenzel, "Surface roughness and contact angle," J. Phys. Chem., vol. 53, no. 9, pp. 1466-1467, Sep. 1949.
59. V. Barbier, M. Tatoulian, H. Li, F. Arefi-Khonsari, A. Ajdari, and P. Tabeling, "Stable modification of PDMS surface properties by plasma polymerization: Application to the formation of double emulsions in microfluidic systems," Langmuir, vol. 22, no. 12, pp. 5230-5232, Jun. 2006. (Pubitemid 43954496)
60. A. Anderson and W. R. Ashurst, "Enabling organosilicon chemistries on inert polymer surfaces with a vapor-deposited silica layer," Langmuir, vol. 25, no. 19, pp. 11 541-11 548, Oct. 2009.
61. J. M. Gere and S. P. Timoshenko, Mechanics of Materials. Boston, MA: PWS Publ. Co., 1997.
62. T. R. Hsu, MEMS & Microsystems: Design and Manufacture. New Delhi, India: McGraw-Hill, 2002.
63. 2 with amine functional silane coupling agents on glass fibers," J. Colloid Interface Sci., vol. 96, no. 1, pp. 69-79, Nov. 1983.
64. K. P. Battjes, A. M. Barolo, and P. Dreyfuss, "New evidence related to reactions of aminated silane coupling agents with carbon dioxide," J. Adhesion Sci. Technol., vol. 5, no. 10, pp. 785-799, 1991. (Pubitemid 21729043)
65. O. Leal, C. Bolivar, C. Ovalles, J. J. Garcia, and Y. Espidel, "Reversible adsorption of carbon dioxide on amine surface-bonded silica gel," Inorg. Chem. Acta, vol. 240, no. 1/2, pp. 183-189, Dec. 1995.