Effect of temperature on in-use stiction of cantilever beams coated with perfluorinated alkysiloxane monolayers

Journal of Microelectromechanical Systems

Volumn 15, Issue 4, 2006, Pages 737-744

  Fréchette, Joëlle ^a,b   Maboudian, Roya ^a   Carraro, Carlo ^a  

^a University of California   (United States)

^b Johns Hopkins University   (United States)

Author keywords

Microelectromechanical systems (MEMS); Monolayer coating; Stiction; Thermal stability

Indexed keywords

ANNEALING; CROSSLINKING; DECOMPOSITION; MONOLAYERS; POLYCRYSTALLINE MATERIALS; STICTION; THERMAL EFFECTS; THERMODYNAMIC STABILITY;

PERFLUORINATED ALKYSILOXANE MONOLAYERS; PERFLUORODECYLDIMETHYLCHLOROSILANE; PERFLUORODECYLTRICHLOROSILANE;

CANTILEVER BEAMS;

EID: 33747412232     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.878893     Document Type: Article

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