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Advanced Functional Materials

Volumn 21, Issue 6, 2011, Pages 1147-1153

Fabrication of multiscale gradient polymer patterns by direct molding and spatially controlled reflow

(3) Chae, Jae Joon a Lee, Sung Hoon a Suh, Kahp Y a

a Seoul National University (South Korea)

Author keywords

capillary force lithography; microchannel; multiscale patterns; patterning; reflow

Indexed keywords

ASHING PROCESS; CAPILLARY FORCE LITHOGRAPHY; GLASS SUBSTRATES; GLASS TRANSITION TEMPERATURE; GRADIENT POLYMERS; HEATING MODE; LINE PATTERN; LINE-AND-SPACE; MICRO PATTERN; MULTISCALE PATTERNS; MULTISCALES; NANO PATTERN; ORDERS OF MAGNITUDE; PARABOLIC PROFILES; PATTERN SPACING; PATTERNED LAYERS; PATTERNING; POLYMER VISCOSITY; POLYMERIC PATTERNS; REFLOW; REFLOW PROCESS; RESIDUAL LAYERS; SIZE VARIATION; SPACING RANGING; THEORETICAL MODELS;

GLASS; GLASS TRANSITION; HEATING; LITHOGRAPHY; MICROCHANNELS; POLYMER MELTS; SUBSTRATES;

PROCESS CONTROL;

EID: 79952842246 PISSN: 1616301X EISSN: 16163028 Source Type: Journal
DOI: 10.1002/adfm.201001687 Document Type: Article

Times cited : (12)

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