Fabrication of large number density platinum nanowire arrays by size reduction lithography and nanoimprint lithography

Nano Letters

Volumn 5, Issue 4, 2005, Pages 745-748

  Yan, X M ^a   Kwon, S ^b   Centreras, A M ^a   Bokor, J ^b,c   Somorjal, G A ^a,b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NANOIMPRINT LITHOGRAPHY; PLATINUM NANOWIRES; SHADOW DEPOSITION TECHNIQUES; SIZE REDUCTION LITHOGRAPHY;

CHEMICAL VAPOR DEPOSITION; PHOTOLITHOGRAPHY; PLATINUM; POLYMETHYL METHACRYLATES; PRESSURE EFFECTS; REACTIVE ION ETCHING; SELF ASSEMBLY; SILICON; SINGLE CRYSTALS; THIN FILMS; ULTRAVIOLET RADIATION;

NANOSTRUCTURED MATERIALS;

EID: 18144430264     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl050228q     Document Type: Article

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