Soft-contact optical lithography using transparent elastomeric stamps: Application to nanopatterned organic light-emitting devices

Advanced Functional Materials

Volumn 15, Issue 9, 2005, Pages 1435-1439

  Lee, Tae Woo ^a   Jeon, Seokwoo ^b   Maria, Joana ^b   Zaumseil, Jana ^a   Hsu, Julia W P ^a   Rogers, John A ^b  

^a LUCENT TECHNOLOGIES   (United States)

^b University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRACKS; ELECTRODES; LAMINATING; LIGHT EMITTING DIODES; MICROSTRUCTURE; PLATES (STRUCTURAL COMPONENTS); QUARTZ; SILICA;

EDGE PATTERNS; ELASTOMERIC MOLDS; NON-CONTACT REGION; PHOTOMASKS;

PHOTOLITHOGRAPHY;

EID: 24644448864     PISSN: 1616301X     EISSN: None     Source Type: Journal    
DOI: 10.1002/adfm.200500109     Document Type: Article

References (13)

1. J. A. Rogers, K. E. Paul, R. J. Jackman, G. M. Whitesides, Appl. Phys. Lett. 1997, 70, 2658.
2. Y. Xia, G. M. Whitesides, Angew. Chem. Int. Ed. 1998, 37, 550.
3. Y.-L. Loo, R. L. Willett, K. W. Baldwin, J. A. Rogers, J. Am. Chem. Soc. 2002, 124, 7654.
4. J. A. Rogers, K. E. Paul, R. J. Jackman, G. M. Whitesides, J. Vac. Sci. Tech. B 1998, 16, 59.
5. T. W. Odom, J. C. Love, D. B. Wolfe, K. E. Paul, G. M. Whitesides, Langmuir 2002, 18, 5314.
6. Y.-L. Loo, T. Someya, K. W. Baldwin, Z. Bao, P. K. H. Ho, A. Dodabalapur, H. E. Katz, J. A. Rogers. Proc. N atl. Acad. Sci. USA 2002, 99, 10252.
7. T.-W. Lee, J. Zaumseil, Z. Bao, J. W. P. Hsu, J. A. Rogers, Proc. Natl. Acad. Sci. USA 2004, 101, 429.
8. T.-W. Lee, J. Zaumseil, S. H. Kim, J. W. P. Hsu, Adv. Mater. 2004, 16, 2040.
9. J. G. C. Veinot, H. Yan, S. M. Smith, J. Cui, Q. Huang, T. J. Marks, Nano Lett. 2002, 2, 333.
10. E. Menard, L. Bilhaut, J. Zaumseil. J. A. Rogers, Langmuir 2004, 20, 6871.
11. Nonlinearity refers to the changes in absorbance and refractive index as functions of exposure dose. The absorbance of the Shipley photoresist increased upon exposure. See "Microposit S1800 Series Photo Resists" information supplied by the supplier at http://electronicmaterials.rohmhaas.com, http://www.townetech.com/shipley.htm, and http://cmi.epfl.ch/materials/ Data_S1800.pdf, last accessed June 2005.
12. M. T. Bernius, M. Inbasekaran, Adv. Mater. 2000, 12, 1737.
13. Y. Koide, M. W. Such, R. Basu, G. Evmenenko, J. Cui, P. Dutta, M. C. Hersam, T. J. Marks, Langmuir 2003, 19, 86.