Patterning and templating for nanoelectronics

Advanced Materials

Volumn 22, Issue 6, 2010, Pages 769-778

  Galatsis, Kosmas ^a,b   Wang, Kang L ^b   Ozkan, Mihri ^c   Ozkan, Cengiz S ^c   Huang, Yu ^b   Chang, Jane P ^b   Monbouquette, Harold G ^b   Chen, Yong ^a   Nealey, Paul ^d   Botros, Youssry ^e  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Department of Civil and Environmental Engineering   (United States)

^c Intel Corporation ^*  (United States)

^d University of Wisconsin Madison   (United States)

^e INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALTERNATIVE APPROACH; CMOS SCALING; INFORMATION PROCESSING; LOS ANGELES; MAGNETIC DOTS; MOORE'S LAW; NANOARCHITECTURES; PATTERNING METHODS; PATTERNING TECHNIQUES; PATTERNING TECHNOLOGY; SEMICONDUCTOR INDUSTRY; SILICON INTEGRATED CIRCUITS; TECHNOLOGY NODES; TEMPLATING; TOPDOWN;

DATA PROCESSING; LITHOGRAPHY; SEMICONDUCTOR DEVICE MANUFACTURE;

NANOELECTRONICS;

DNA; NANOMATERIAL; QUANTUM DOT;

ARTICLE; CHEMISTRY; ELECTRONICS; SEMICONDUCTOR;

DNA; ELECTRONICS; NANOSTRUCTURES; QUANTUM DOTS; SEMICONDUCTORS;

EID: 77049107410     PISSN: 09359648     EISSN: 15214095     Source Type: Journal    
DOI: 10.1002/adma.200901689     Document Type: Article

References (36)

1. Semiconductor Industry Association (SIA), International Technology Roadmap for Semiconductors 2007, www.itrs.net (last accessed October 2009).
2. L. P. Ma, W. J. Yang, S. S. Xie, S. J. Pang, Appl. Phys. Lett. 1998, 73, 3303.
3. A. N. Broers, A. C. F. Hoole, J. M. Ryan, Microelectron. Eng. 1996, 32, 131.
4. K. H. Hsu, P. L. Schultz, P. M. Ferreira, N. X. Fang, Nano Lett. 2007, 7, 446.
5. Y. Chang, S. Huang, Y. Chen, Small 2009, 5, 63.
6. Z. Gu, S. Huang, Y. Chen, Angew. Chem. Int. Ed. 2009, 48, 829.
7. C. Radhakrishnan, M. Lo, M. Warrier, M. Garcia-Garibay, H. Monbouquette, Langmuir 2006, 22, 5018.
8. R. A. Segalman, A. Hexemer, E. J. Kramer, Phys. Rev. Lett. 2003, 91, 196101.
9. M. P. Stoykovich, P. F. Nealey, Mater. Today 2006, 9, 20.
10. J. Liu, Y. Mao, E. Lan, D. R. Banatao, G. J. Forse, J. Lu, H. O. Blom, T. O. Yeates, B. Dunn, J. P. Chang, J. Am. Chem. Soc. 2008, 130, 16908.
11. P. W. K. Rothemund, Nature 2006, 440, 297.
12. P. W. K. Rothemund, ICCAD-2005, IEEE/ACM Int. Conf. on Computer- Aided Design, November 2005, pp. 471-4478.
13. M. R. Arkin, E. D. A. Stemp, R. E. Holmlin, J. K. Barton, A. Hormann, E. J. C. Olson, P. F. Barbara, Science 1996, 273, 475.
14. J. R. Heath, M. A. Ratner, Phys. Today 2003, 56, 43.
15. N. C. Seeman, Ann. Rev. Biophys. Biomol. Struct. 1998, 27, 225.
16. N. C. Seeman, Nature 2003, 421, 427.
17. C. Dwyer, M. Guthold, M. Falvo, S. Washburn, R. Superfine, D. Erie, Nanotechnology 2002, 13, 601.
18. M. Zheng, A. Jagota, E. D. Semke, B. A. Diner, R. S. McLean, S. R. Lustig, R. E. Richardson, N. G. Tassi, Nat. Mater. 2003, 2, 338.
19. F. L. Xu Wang, G. T. Senthil Andavan, X. Jing, K. Singh, V. R. Yazdanpanah, N. Bruque, R. R. Pandey, R. Lake, M. Ozkan, K. L. Wang, C. S. Ozkan, Small 2006, 2, 1356.
20. E. Winfree, F. Liu, L. A. Wenzler, N. C. Seeman, Nature 1998, 394, 539.
21. S. Ravindran, S. Chaudhary, B. Colburn, M. Ozkan, C. S. Ozkan, Nano Lett. 2003, 3, 447.
22. X. Wang, F. Liu, G. T. S. Andavan, X. Jing, K. Singh, V. R. Yazdanpanah, N. Bruque, R. R. Pandey, R. Lake, M. Ozkan, K. L.Wang, C. S. Ozkan, Small 2006, 2, 1356.
23. Y. Huang, C.-Y. Chiang, S. K. Lee, Y. Gao, E. L. Hu, J. D. Yoreo, A. M. Belcher, Nano Lett. 2005, 5, 1429.
24. S.-W. Lee, C. Mao, C. E. Flynn, A. M. Belcher, Science 2002, 296, 892.
25. S. R. Whaley, D. S. English, E. L. Hu, P. F. Barbara, A. M. Belcher, Nature 2000, 405, 665.
26. S.-K. Lee, D. S. Yun, A. M. Belcher, Biomacromolecules 2006, 7, 14.
27. R. J. Tseng, C. Tsai, L. Ma, J. Ouyang, C. S. Ozkan, Y. Yang, Nat. Nanotechnol. 2006, 1, 72.
28. N. G. Portney, A. A. Martinez-Morales, M. Ozkan, 2008, 2, 191.
29. C.-C. Liu, P. F. Nealey, Y.-H. Ting, A. E. Wendt, J. Vac. Sci. Technol. B 2007, 25, 1963.
30. K. Kempa, B. Kimball, J. Rybczynski, Z. P. Huang, P. F. Wu, D. Steeves, M. Sennett, M. Giersig, D. V. G. L. N. Rao, D. L. Carnahan, D. Z. Wang, J. Y. Lao, W. Z. Li, Z. F. Ren, Nano Lett. 2003, 3, 13.
31. J. P. Patwardhan, C. Dwyer, A. R. Lebeck, D. J. Sorin, in Foundations of Nanoscience: Self-Assembled Architectures and Devices (Ed. J. Reif) ScienceTechnica, Snowbird, UT (USA), 2004, pp. 344-358.
32. S. E. Lyshevski, "Nanotechnology and Super High-density Threedimensional Nanoelectronics and NanoICs", presented at IEEE-NANO 2003, Third IEEE Conf. on Nanotechnology 2003, 2, 655.
33. M. B. Tahoori, DFT 2005, 20th IEEE Int. Symp. on Defect and Fault Tolerance in VLSI Systems, Boston, October 2005, pp. 3-11.
34. K. K. Likharev, "CMOL: A New Concept for Nanoelectronics", presented at the 12th Int. Symp. on Nanostructures Physics and Technology, St. Petersburg, Russia, June 2004.
35. K. K. Likharev, Interface 2005, 14, 43.
36. K. L. Konstantin, Microelectron. J. 2008, 39, 177.