Fabrication of gapless triangular micro-lens array

Sensors and Actuators, A: Physical

Volumn 134, Issue 2, 2007, Pages 631-640

  Pan, C T ^a   Su, C H ^a  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

Gapless micro lens; Luminance; Passivation; Triangular

Indexed keywords

CURRENT DENSITY; ELECTROPLATING; LUMINANCE; OPTICAL FILMS; PASSIVATION; PHOTOLITHOGRAPHY; PHOTORESISTS;

GAPLESS MICRO-LENS; GAPLESS TRIANGULAR MICRO-LENS ARRAY (GTMA) OPTICAL FILMS; PHOTORESIST TRIANGULAR COLUMN ARRAYS;

MICROLENSES;

EID: 33847373707     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.05.045     Document Type: Article

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