Micro-ball lens array modeling and fabrication using thermal reflow in two polymer layers

Journal of Micromechanics and Microengineering

Volumn 14, Issue 2, 2004, Pages 277-282

  Yang, Hsiharng ^a   Chao, Ching Kong ^b   Lin, Che Ping ^b   Shen, Sheng Chih ^c  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^c INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

MICRO BALL LENS ARRAYS; THERMAL REFLOW;

GLASS TRANSITION; MATHEMATICAL MODELS; MELTING; MICROLENSES; PHOTORESISTS; POLYIMIDES; SURFACE TENSION;

MICROELECTRONICS;

EID: 1342326316     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/2/016     Document Type: Article

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