Phonon-tunnelling dissipation in mechanical resonators

Nature Communications

Volumn 2, Issue 1, 2011, Pages

  Cole, Garrett D ^a   Wilson Rae, Ignacio ^b   Werbach, Katharina ^a   Vanner, Michael R ^a   Aspelmeyer, Markus ^a  

^a UNIVERSITY OF VIENNA   (Austria)

^b TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARTICLE; ENGINEERING; MECHANICS; MOBILE PHONE; NANODEVICE; PHONON; ELECTRON SPIN RESONANCE; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; MATHEMATICAL COMPUTING; METHODOLOGY; NANOTECHNOLOGY; TRANSDUCER;

ELECTRON SPIN RESONANCE SPECTROSCOPY; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MATHEMATICAL COMPUTING; MECHANICS; NANOTECHNOLOGY; TRANSDUCERS;

EID: 79952466508     PISSN: None     EISSN: 20411723     Source Type: Journal    
DOI: 10.1038/ncomms1212     Document Type: Article

References (51)

1. Craighead, H. G. Nanoelectromechanical systems. Science 290, 1532-1535 (2000).
2. Ekinci, K. L. & Roukes, M. L. Nanoelectromechanical systems. Rev. Sci. Instrum. 76, 061101 (2005).
3. Wang, K., Wong, A.-C & Nguyen, C T.-C VHF free-free beam high-Q micromechanical resonators. J. Microelectromech. Syst. 9, 347-360 (2000).
4. Cleland, A. N. Foundations ofNanomechanics (Springer, 2003).
5. Bindel, D. S. & Govindjee, S. Elastic PMLs for resonator anchor loss simulation. Int. J. Numer. Methods Eng. 64, 789-818 (2005). (Pubitemid 41444698)
6. Judge, J. A., Photiadis, D. M., Vignola, J. F., Houston, B. H. & Jarzynski, J. Attachment loss of micromechanical and nanomechanical resonators in the limits of thick and thin support structures. J. Appl. Phys. 101, 013521 (2007).
7. Anetsberger, G., Riviere, R., Schliesser, A., Arcizet, O. & Kippenberg, T. J. Ultralow-dissipation optomechanical resonators on a chip. Nature Photonics 2, 627-633 (2008).
8. Clark, J., Hsu, W.-T., Abdelmoneum, M. & Nguyen, C.-C High-Q UHF micromechanical radial-contour mode disk resonators. J. Microelectromech. Syst. 14, 1298-1310 (2005). (Pubitemid 41830203)
9. Lutz, M. et al MEMS oscillators for high volume commercial applications. in Proc Transducers, Solid-State Sensors, Actuators andMicrosyst (2007). 14th Int. Conf.
10. Sidles, J. A. et al Magnetic resonance force microscopy Rev. Mod. Phys. 67, 249-265 (1995).
11. Rugar, D., Budakian, R., Mamin, H. J. & Chui, B. W. Single spin detection by magnetic resonance force microscopy Nature 430, 329-332 (2004). (Pubitemid 38937736)
12. Degen, C. L., Poggio, M., Mamin, H. J., Rettner, C. T. & Rugar, D. Nanoscale magnetic resonance imaging. Proc NatlAcad. Sci USA 106, 1313-1317 (2009).
13. Li, M., Tang, H. X. & Roukes, M. L. Ultra-sensitive nems-based cantilevers for sensing, scanned probe and very high-frequency applications. Nat. Nanotechnol. 2, 114-120 (2007). (Pubitemid 46226371)
14. Jensen, K., Kim, K. & Zettl, A. An atomic-resolution nanomechanical mass sensor. Nat. Nanotechnol. 3, 533-537 (2008).
15. Naik, A. K., Hanay, M. S., Hiebert, W. K., Feng, X. L. & Roukes, M. L. Towards single-molecule nanomechanical mass spectrometry Nat. Nanotechnol. 4, 445-450 (2009).
16. Armour, A. D., Blencowe, M. P. & Schwab, K. C Entanglement and decoherence of a micromechanical resonator via coupling to a cooper-pair box. Phys. Rev. Lett. 88, 148301 (2002).
17. Marshall, W., Simon, C., Penrose, R. & Bouwmeester, D. Towards quantum superpositions of a mirror. Phys. Rev. Lett. 91, 130401 (2003).
18. Blencowe, M. Quantum electromechanical systems. Phys. Rep. 395, 159-222 (2004). (Pubitemid 38491780)
19. Schwab, K. C & Roukes, M. L. Putting mechanics into quantum mechanics. Phys. Today 58, 36-42 (2005). (Pubitemid 41148701)
20. Kippenberg, T. J. & Vahala, K. J. Cavity optomechanics: back-action at the mesoscale. Science 321, 1172-1176 (2008).
21. Aspelmeyer, M. & Zeilinger, A. A quantum renaissance. Phys. World 21, 22-28 (2008).
22. Aspelmeyer, M. & Schwab, K. Focus on mechanical systems at the quantum limit. NewJ. Phys. 10, 095001 (2008).
23. O'Connell, A. D. et al. Quantum ground state and single-phonon control of a mechanical resonator. Nature 464, 697-703 (2010).
24. Wilson-Rae, I. Intrinsic dissipation in nanomechanical resonators due to phonon tunneling. Phys. Rev. B 77, 245418 (2008).
25. Kiselev, A. A. & Iafrate, G. J. Phonon dynamics and phonon assisted losses in Euler-Bernoulli nanobeams. Phys. Rev. B 77, 205436 (2008).
26. Zener, C Internal friction in solids. I. Teory of internal friction in reeds. Phys. Rev. 52, 230-235 (1937).
27. Lifshitz, R. & Roukes, M. L. Termoelastic damping in micro-and nanomechanical systems. Phys. Rev. B 61, 5600-5609 (2000).
28. Duwel, A., Candler, R. N., Kenny, T. W. & Varghese, M. Engineering MEMS resonators with low thermoelastic damping. J. Microelectromech. Syst 15, 1437-1445 (2006). (Pubitemid 44921761)
29. Vignola, J. F. et al. Efect of viscous loss on mechanical resonators designed for mass detection. Appl. Phys. Lett. 88, 041921 (2006).
30. Karabacak, D. M., Yakhot, V. & Ekinci, K. L. High-frequency nanofuidics: an experimental study using nanomechanical resonators. Phys. Rev. Lett. 98, 254505 (2007).
31. Verbridge, S. S., Craighead, H. G. & Parpia, J. M. A megahertz nanomechanical resonator with room temperature quality factor over a million. Appl. Phys. Lett. 92, 013112 (2008).
32. Yasumura, K. et al. Quality factors in micron-and submicron-thick cantilevers. J. Microelectromech. Syst. 9, 117-125 (2000). (Pubitemid 30581703)
33. Mohanty, P. et al. Intrinsic dissipation in high-frequency micromechanical resonators. Phys. Rev. B 66, 085416 (2002).
34. Verbridge, S. S. et al. High quality factor resonance at room temperature with nanostrings under high tensile stress. J. Appl. Phys. 99, 124304 (2006).
35. Southworth, D. R. et al. Stress and silicon nitride: a crack in the universal dissipation of glasses. Phys. Rev. Lett. 102, 225503 (2009).
36. Venkatesan, A. et al. Dissipation due to tunneling two-level systems in gold nanomechanical resonators. Phys. Rev. B 81, 073410 (2010).
37. Unterreithmeier, Q. P., Faust, T. & Kotthaus, J. P. Damping of nanomechanical resonators. Phys. Rev. Lett. 105, 027205 (2010).
38. Seoánez, C., Guinea, F. & Castro Neto, A. H. Surface dissipation in nanoelectromechanical systems: unifed description with the standard tunneling model and efects of metallic electrodes. Phys. Rev. B 77, 125107 (2008).
39. Remus, L. G., Blencowe, M. P. & Tanaka, Y Damping and decoherence of a nanomechanical resonator due to a few two-level systems. Phys. Rev. B 80, 174103 (2009).
40. Mattila, T. et al. A 12 MHz micromechanical bulk acoustic mode oscillator. Sens. Actuators A Phys. 101, 1-9 (2002).
41. Eichenfeld, M., Chan, J., Camacho, R. M., Vahala, K. J. & Painter, O. Optomechanical crystals. Nature 462, 78-82 (2009).
42. Cross, M. C. & Lifshitz, R. Elastic wave transmission at an abrupt junction in a thin plate with application to heat transport and vibrations in mesoscopic systems. Phys. Rev. B 64, 085324 (2001).
43. Park, Y-H. & Park, K. C. High-fdelity modeling of MEMS resonators-part I: anchor loss mechanisms through substrate. J. Microelectromech. Syst. 13, 238-247 (2004).
44. Photiadis, D. M. & Judge, J. A. Attachment losses of high Q oscillators. Appl. Phys. Lett. 85, 482-484 (2004).
45. Graf, K. F. Wave Motion in Elastic Solids (Dover, 1991).
46. Gröblacher, S. et al. Demonstration of an ultracold micro-optomechanical oscillator in a cryogenic cavity Nat Phys. 5, 485-488 (2009).
47. Cole, G. D., Gröblacher, S., Gugler, K., Gigan, S. & Aspelmeyer, M. Monocrystalline Al(x)Ga(1-x)As heterostructures for high-refectivity high-q micromechanical resonators in the megahertz regime. Appl. Phys. Lett. 92, 261108 (2008).
48. LaHaye, M. D., Suh, J., Echternach, P. M., Schwab, K. C. & Roukes, M. L. Nanomechanical measurements of a superconducting qubit. Nature 459, 960-964 (2009).
49. Wilson-Rae, I. et al. High-Q nanomechanics via destructive interference of elastic waves. Phys. Rev. Lett. 106, 047205 (2011).
50. Cole, G. D., Bai, Y, Aspelmeyer, M. & Fitzgerald, E. A. Free-standing Al(x)Ga(1-x)As heterostructures by gas-phase etching of germanium. Appl. Phys. Lett. 96, 261102 (2010).
51. Cole, G. D. et al. Megahertz monocrystalline optomechanical resonators with minimal dissipation in Proc IEEE Micro Electro Mechanical? Syst. 847-850 (2010). 23rd Int. Conf.