SCOPUS 정보 검색 플랫폼

Physical Review Letters

Volumn 105, Issue 2, 2010, Pages

Damping of nanomechanical resonators

(3) Unterreithmeier, Quirin P a Faust, Thomas a Kotthaus, Jörg P a

a UNIVERSITY OF MUNICH (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC THEORY; FIT PARAMETERS; LOCAL STRAINS; MICROSCOPIC MECHANISMS; MODE INDEX; NANOMECHANICAL RESONATORS; OSCILLATORY MODE; RESONANCE FREQUENCIES; SINGLE FREQUENCY;

RESONANCE; SILICON NITRIDE; TENSILE STRESS;

DAMPING;

EID: 77954556070 PISSN: 00319007 EISSN: 10797114 Source Type: Journal
DOI: 10.1103/PhysRevLett.105.027205 Document Type: Article

Times cited : (241)

References (31)

1
- 51349147454
- 1748-3387 10.1038/nnano.2008.200
- K. Jensen, K. Kim, and A. Zettl, Nature Nanotech. 1748-3387 3, 533 (2008). 10.1038/nnano.2008.200
- (2008) Nature Nanotech. , vol.3 , pp. 533
- Jensen, K.¹ Kim, K.² Zettl, A.³

2
- 58149293965
- NALEFD 1530-6984 10.1021/nl801982v
- B. Lassagne, D. Garcia-Sanchez, A. Aguasca, and A. Bachtold, Nano Lett. 8, 3735 (2008). NALEFD 1530-6984 10.1021/nl801982v
- (2008) Nano Lett. , vol.8 , pp. 3735
- Lassagne, B.¹ Garcia-Sanchez, D.² Aguasca, A.³ Bachtold, A.⁴

3
- 67649274390
- NATUAS 0028-0836 10.1038/nature08093
- M.D. LaHaye, J. Suh, P.M. Echternach, K.C. Schwab, and M.L. Roukes, Nature (London) NATUAS 0028-0836 459, 960 (2009). 10.1038/nature08093
- (2009) Nature (London) , vol.459 , pp. 960
- Lahaye, M.D.¹ Suh, J.² Echternach, P.M.³ Schwab, K.C.⁴ Roukes, M.L.⁵

4
- 72549089377
- 1748-3387 10.1038/nnano.2009.343
- J.D. Teufel, T. Donner, M.A. Castellanos-Beltran, J.W. Harlow, and K.W. Lehnert, Nature Nanotech. 1748-3387 4, 820 (2009). 10.1038/nnano.2009.343
- (2009) Nature Nanotech. , vol.4 , pp. 820
- Teufel, J.D.¹ Donner, T.² Castellanos-Beltran, M.A.³ Harlow, J.W.⁴ Lehnert, K.W.⁵

5
- 18144416607
- PRLTAO 0031-9007 10.1103/PhysRevLett.94.156403
- J.S. Aldridge and A.N. Cleland, Phys. Rev. Lett. 94, 156403 (2005). PRLTAO 0031-9007 10.1103/PhysRevLett.94.156403
- (2005) Phys. Rev. Lett. , vol.94 , pp. 156403
- Aldridge, J.S.¹ Cleland, A.N.²

6
- 73849131307
- NATUAS 0028-0836 10.1038/nature08681
- T. Rocheleau, T. Ndukum, C. Macklin, J.B. Hertzberg, A.A. Clerk, and K.C. Schwab, Nature (London) NATUAS 0028-0836 463, 72 (2010). 10.1038/nature08681
- (2010) Nature (London) , vol.463 , pp. 72
- Rocheleau, T.¹ Ndukum, T.² MacKlin, C.³ Hertzberg, J.B.⁴ Clerk, A.A.⁵ Schwab, K.C.⁶

7
- 57049183635
- NATUAS 0028-0836 10.1038/nature07545
- M. Li, W.H.P. Pernice, C. Xiong, T. Baehr-Jones, M. Hochberg, and H.X. Tang, Nature (London) NATUAS 0028-0836 456, 480 (2008). 10.1038/nature07545
- (2008) Nature (London) , vol.456 , pp. 480
- Li, M.¹ Pernice, W.H.P.² Xiong, C.³ Baehr-Jones, T.⁴ Hochberg, M.⁵ Tang, H.X.⁶

8
- 53349164669
- NPAHAX 1745-2473 10.1038/nphys1057
- S. Etaki, M. Poot, I. Mahboob, K. Onomitsu, H. Yamaguchi, and H.S.J. van der Zant, Nature Phys. NPAHAX 1745-2473 4, 785 (2008). 10.1038/nphys1057
- (2008) Nature Phys. , vol.4 , pp. 785
- Etaki, S.¹ Poot, M.² Mahboob, I.³ Onomitsu, K.⁴ Yamaguchi, H.⁵ Zant Dervan, J.H.S.⁶

9
- 67349158605
- NATUAS 0028-0836 10.1038/nature08061
- M. Eichenfield, R. Camacho, J. Chan, K.J. Vahala, and O. Painter, Nature (London) NATUAS 0028-0836 459, 550 (2009). 10.1038/nature08061
- (2009) Nature (London) , vol.459 , pp. 550
- Eichenfield, M.¹ Camacho, R.² Chan, J.³ Vahala, K.J.⁴ Painter, O.⁵

10
- 33745725576
- JAPIAU 0021-8979 10.1063/1.2204829
- S.S. Verbridge, J.M. Parpia, R.B. Reichenbach, L.M. Bellan, and H.G. Craighead, J. Appl. Phys. 99, 124304 (2006). JAPIAU 0021-8979 10.1063/1.2204829
- (2006) J. Appl. Phys. , vol.99 , pp. 124304
- Verbridge, S.S.¹ Parpia, J.M.² Reichenbach, R.B.³ Bellan, L.M.⁴ Craighead, H.G.⁵

11
- 67650389150
- NALEFD 1530-6984 10.1021/nl900612h
- A.K. Huettel, G.A. Steele, B. Witkamp, M. Poot, L.P. Kouwenhoven, and H.S.J. van der Zant, Nano Lett. 9, 2547 (2009). NALEFD 1530-6984 10.1021/nl900612h
- (2009) Nano Lett. , vol.9 , pp. 2547
- Huettel, A.K.¹ Steele, G.A.² Witkamp, B.³ Poot, M.⁴ Kouwenhoven, L.P.⁵ Zant Dervan, J.H.S.⁶

12
- 65549145100
- NATUAS 0028-0836 10.1038/nature07932
- Q.P. Unterreithmeier, E.M. Weig, and J.P. Kotthaus, Nature (London) NATUAS 0028-0836 458, 1001 (2009). 10.1038/nature07932
- (2009) Nature (London) , vol.458 , pp. 1001
- Unterreithmeier, Q.P.¹ Weig, E.M.² Kotthaus, J.P.³

13
- 67649964465
- APPLAB 0003-6951 10.1063/1.3155164
- Q.P. Unterreithmeier, S. Manus, and J.P. Kotthaus, Appl. Phys. Lett. 94, 263104 (2009). APPLAB 0003-6951 10.1063/1.3155164
- (2009) Appl. Phys. Lett. , vol.94 , pp. 263104
- Unterreithmeier, Q.P.¹ Manus, S.² Kotthaus, J.P.³

14
- 34548402991
- APPLAB 0003-6951 10.1063/1.2776981
- N.O. Azak, M.Y. Shagam, D.M. Karabacak, K.L. Ekinci, D.H. Kim, and D.Y. Jang, Appl. Phys. Lett. 91, 093112 (2007). APPLAB 0003-6951 10.1063/1.2776981
- (2007) Appl. Phys. Lett. , vol.91 , pp. 093112
- Azak, N.O.¹ Shagam, M.Y.² Karabacak, D.M.³ Ekinci, K.L.⁴ Kim, D.H.⁵ Jang, D.Y.⁶

15
- 0003672941
- Wiley, New York
- W. Weaver, S.P. Timoshenko, and D.H. Young, Vibration Problems in Engineering (Wiley, New York, 1990).
- (1990) Vibration Problems in Engineering
- Weaver, W.¹ Timoshenko, S.P.² Young, D.H.³

16
- 0004195833
- CRC Press, Boca Raton
- M.G. el Hak, The MEMS Handbook (CRC Press, Boca Raton, 2001).
- (2001) The MEMS Handbook
- El Hak, M.G.¹

17
- 0003168583
- PHRVAO 0031-899X 10.1103/PhysRev.53.90
- C. Zener, Phys. Rev. 53, 90 (1938). PHRVAO 0031-899X 10.1103/PhysRev.53. 90
- (1938) Phys. Rev. , vol.53 , pp. 90
- Zener, C.¹

18
- 77954551188
- See supplementary material at http://link.aps.org/supplemental/10.1103/ PhysRevLett.105.027205.

19
- 56349094414
- JAPIAU 0021-8979 10.1063/1.3008032
- S. Schmid and C. Hierold, J. Appl. Phys. 104, 093516 (2008). JAPIAU 0021-8979 10.1063/1.3008032
- (2008) J. Appl. Phys. , vol.104 , pp. 093516
- Schmid, S.¹ Hierold, C.²

20
- 66749161998
- PRLTAO 0031-9007 10.1103/PhysRevLett.102.225503
- D.R. Southworth, R.A. Barton, S.S. Verbridge, B. Ilic, A.D. Fefferman, H.G. Craighead, and J.M. Parpia, Phys. Rev. Lett. 102, 225503 (2009). PRLTAO 0031-9007 10.1103/PhysRevLett.102.225503
- (2009) Phys. Rev. Lett. , vol.102 , pp. 225503
- Southworth, D.R.¹ Barton, R.A.² Verbridge, S.S.³ Ilic, B.⁴ Fefferman, A.D.⁵ Craighead, H.G.⁶ Parpia, J.M.⁷

21
- 0036822230
- RMPHAT 0034-6861 10.1103/RevModPhys.74.991
- R.O. Pohl, X. Liu, and E. Thompson, Rev. Mod. Phys. 74, 991 (2002). RMPHAT 0034-6861 10.1103/RevModPhys.74.991
- (2002) Rev. Mod. Phys. , vol.74 , pp. 991
- Pohl, R.O.¹ Liu, X.² Thompson, E.³

22
- 34547379214
- NALEFD 1530-6984 10.1021/nl070716t
- S. Verbridge, D. Shapiro, H. Craighead, and J. Parpia, Nano Lett. 7, 1728 (2007). NALEFD 1530-6984 10.1021/nl070716t
- (2007) Nano Lett. , vol.7 , pp. 1728
- Verbridge, S.¹ Shapiro, D.² Craighead, H.³ Parpia, J.⁴

23
- 0942267227
- 0924-4247 SAAPEB 10.1016/j.sna.2003.09.037
- Z. Hao, A. Erbil, and F. Ayazi, Sens. Actuators. A, Phys. 0924-4247 SAAPEB 109, 156 (2003). 10.1016/j.sna.2003.09.037
- (2003) Sens. Actuators. A, Phys. , vol.109 , pp. 156
- Hao, Z.¹ Erbil, A.² Ayazi, F.³

24
- 45349098830
- PRBMDO 1098-0121 10.1103/PhysRevB.77.245418
- I. Wilson-Rae, Phys. Rev. B PRBMDO 1098-0121 77, 245418 (2008). 10.1103/PhysRevB.77.245418
- (2008) Phys. Rev. B , vol.77 , pp. 245418
- Wilson-Rae, I.¹

25
- 0000018940
- PRBMDO 0163-1829 10.1103/PhysRevB.61.5600
- R. Lifshitz and M.L. Roukes, Phys. Rev. B PRBMDO 0163-1829 61, 5600 (2000). 10.1103/PhysRevB.61.5600
- (2000) Phys. Rev. B , vol.61 , pp. 5600
- Lifshitz, R.¹ Roukes, M.L.²

26
- 44449089023
- PRBMDO 1098-0121 10.1103/PhysRevB.77.205436
- A.A. Kiselev and G.J. Iafrate, Phys. Rev. B PRBMDO 1098-0121 77, 205436 (2008). 10.1103/PhysRevB.77.205436
- (2008) Phys. Rev. B , vol.77 , pp. 205436
- Kiselev, A.A.¹ Iafrate, G.J.²

27
- 0001694949
- JOPYA6 0368-3400
- A. Akhieser, J. Phys. (Moscow) JOPYA6 0368-3400 1, 277 (1939).
- (1939) J. Phys. (Moscow) , vol.1 , pp. 277
- Akhieser, A.¹

28
- 0011152217
- Springer, New York
- A.N. Cleland, Foundations of Nanomechanics (Springer, New York, 2003).
- (2003) Foundations of Nanomechanics
- Cleland, A.N.¹

29
- 0004364605
- ZEPYAA 0044-3328 10.1007/BF01401204
- J. Jackle, Z. Phys. ZEPYAA 0044-3328 257, 212 (1972). 10.1007/BF01401204
- (1972) Z. Phys. , vol.257 , pp. 212
- Jackle, J.¹

30
- 0036903107
- JMIYET 1057-7157 10.1109/JMEMS.2002.805208
- J.L. Yang, T. Ono, and M. Esashi, J. Microelectromech. Syst. 11, 775 (2002). JMIYET 1057-7157 10.1109/JMEMS.2002.805208
- (2002) J. Microelectromech. Syst. , vol.11 , pp. 775
- Yang, J.L.¹ Ono, T.² Esashi, M.³

31
- 0042760419
- APPLAB 0003-6951 10.1063/1.124554
- D.W. Carr, S. Evoy, L. Sekaric, H.G. Craighead, and J.M. Parpia, Appl. Phys. Lett. 75, 920 (1999). APPLAB 0003-6951 10.1063/1.124554
- (1999) Appl. Phys. Lett. , vol.75 , pp. 920
- Carr, D.W.¹ Evoy, S.² Sekaric, L.³ Craighead, H.G.⁴ Parpia, J.M.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.