Modeling and characterization of CMOS-fabricated capacitive micromachined ultrasound transducers

Journal of Microelectromechanical Systems

Volumn 20, Issue 1, 2011, Pages 104-118

  Doody, Christopher B ^a,b   Cheng, Xiaoyang ^c   Rich, Collin A ^c   Lemmerhirt, David F ^c   White, Robert D ^d  

^a TUFTS UNIVERSITY   (United States)

^b STD Med Inc   (United States)

^c Sonetics Ultrasound Inc   (United States)

^d Tufts University   (United States)

Author keywords

Acoustic models; acoustic transducers; capacitive micromachined ultrasound transducers (CMUTs); finite element analysis (FEA); lumped element modeling; ultrasound

Indexed keywords

ACOUSTIC MODEL; CAPACITIVE MICROMACHINED ULTRASOUND TRANSDUCERS (CMUTS); FINITE-ELEMENT ANALYSIS (FEA); LUMPED-ELEMENT MODELING; ULTRASOUND;

ACOUSTIC TRANSDUCERS; BANDWIDTH; CMOS INTEGRATED CIRCUITS; DOPPLER EFFECT; FABRICATION; FINITE ELEMENT METHOD; IMPULSE RESPONSE; MEMS; MICROELECTROMECHANICAL DEVICES; TRANSDUCERS; ULTRASONIC PROPAGATION; ULTRASONIC SCATTERING; ULTRASONICS; WATER TANKS;

ULTRASONIC TRANSDUCERS;

EID: 79551597267     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2093559     Document Type: Article

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