cMUT echographic probes: Design and fabrication process

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2002, Pages 1067-1070

  Caliano, G ^a   Carotenuto, R ^a   Caronti, A ^a   Pappalardo, M ^a   Foglietti, V ^b   Cianci, E ^b   Visigalli, L ^b   Persi, I ^b  

^a ROMA TRE UNIVERSITY   (Italy)

^b CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGE ANALYSIS; PIEZOELECTRIC TRANSDUCERS; PROBES; SILICON WAFERS; ULTRASONIC TRANSDUCERS;

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER; ECHOGRAPHIC PROBE;

ULTRASONIC IMAGING;

EID: 0036989337     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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