Surface micromachined capacitive ultrasonic transducers

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 45, Issue 3, 1998, Pages 678-690

  Ladabaum, Igal ^a   Jin, Xuecheng ^a   Soh, Hyongsok T ^a   Atalar, Abdullah ^a   Khuri Yakub, Butrus T ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; MATHEMATICAL MODELS; SIGNAL TO NOISE RATIO; ULTRASONIC TRANSMISSION;

AIR COUPLED LONGITUDINAL WAVE TRANSMISSIONS; MICROFABRICATED ULTRASONIC TRANSDUCERS;

ULTRASONIC TRANSDUCERS;

EID: 0032070835     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.677612     Document Type: Article

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