Characterization of capacitive micromachined ultrasonic transducers in air using optical measurements

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2000, Pages 947-950

  Hansen, Sean T ^a   Turo, Antoni ^b   Degertekin, F Levent ^c   Khuri Yakub, Butrus T ^a  

^a STANFORD UNIVERSITY   (United States)

^b UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

^c GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS;

CAPACITANCE; CHARACTERIZATION; ELECTRIC IMPEDANCE; EQUIVALENT CIRCUITS; MATHEMATICAL MODELS; MICROMACHINING; NATURAL FREQUENCIES; NONDESTRUCTIVE EXAMINATION;

ULTRASONIC TRANSDUCERS;

EID: 0034579271     PISSN: 10510117     EISSN: None     Source Type: Journal    
DOI: 10.1109/ULTSYM.2000.922697     Document Type: Article

References (5)

1. Surface micromachined capacitive ultrasonic transducers
2. On isothermal squeeze films