Surface micromachined ultrasound transducers in CMOS technology

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 1996, Pages 959-962

  Eccardt, Peter Christian ^a   Niederer, K ^a   Scheiter, T ^a   Hierold, C ^a  

^a SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; CAPACITORS; CMOS INTEGRATED CIRCUITS; ELECTROSTATICS; INTEGRATED CIRCUIT MANUFACTURE; MEDICAL APPLICATIONS; MICROMACHINING; OXIDES; THICK FILMS;

CMOS TECHNOLOGY; ELECTROSTATIC EXCITATION; SKIN DIAGNOSIS; TRANSDUCER MEMBRANES;

ULTRASONIC TRANSDUCERS;

EID: 0030349364     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)