CMUT-in-CMOS ultrasonic transducer arrays with on-chip electronics

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1222-1225

  Cheng, X ^a   Lemmerhirt, D F ^a   Kripfgans, O D ^b   Zhang, M ^b   Yang, C ^a   Rich, C A ^a   Fowlkes, J B ^b  

^a Sonetics Ultrasound Inc   (United States)

^b UNIVERSITY OF MICHIGAN MEDICAL SCHOOL   (United States)

Author keywords

3D imaging; CMUT; Transducer array; Ultrasound

Indexed keywords

2D ARRAYS; 3D IMAGING; CAVITY SEALING; CMOS PROCESSS; ON-CHIP BUFFERS; ON-CHIP ELECTRONICS; POST PROCESS; SACRIFICIAL ETCHING; SIGNAL CONDITIONING; SINGLE CHIPS; TRANSDUCER ARRAY; ULTRASONIC TRANSDUCER ARRAY; ULTRASOUND TRANSDUCER ARRAYS;

ACTUATORS; CHIP SCALE PACKAGES; ELECTROACOUSTIC TRANSDUCERS; ELECTRONIC EQUIPMENT MANUFACTURE; IMAGING SYSTEMS; MEDICAL IMAGING; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; SOLID-STATE SENSORS; THREE DIMENSIONAL; ULTRASONIC EQUIPMENT; ULTRASONIC MEASUREMENT; ULTRASONIC TRANSDUCERS; ULTRASONIC WAVES; ULTRASONICS;

ULTRASONIC IMAGING;

EID: 71449127772     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285878     Document Type: Conference Paper

References (5)

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