Finite-Element Analysis of Capacitive Micromachined Ultrasonic Transducers

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 52, Issue 12, 2005, Pages 2185-2198

  Yaralioglu, Goksen G ^a   Ergun, A Sanli ^a   Khuri Yakub, Butrus T ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIAGNOSTIC AGENT;

ARTICLE; ARTIFICIAL MEMBRANE; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; ECHOGRAPHY; ELECTRIC CAPACITANCE; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; EVALUATION; FINITE ELEMENT ANALYSIS; INSTRUMENTATION; METHODOLOGY; STATISTICAL MODEL; TRANSDUCER;

COMPUTER SIMULATION; COMPUTER-AIDED DESIGN; ELECTRIC CAPACITANCE; ELECTRONICS, MEDICAL; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; FINITE ELEMENT ANALYSIS; LINEAR MODELS; MEMBRANES, ARTIFICIAL; MINIATURIZATION; TRANSDUCERS; ULTRASONOGRAPHY;

EID: 33644849050     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2005.1563262     Document Type: Article

References (20)

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