Novel, wide bandwidth, micromachined ultrasonic transducers

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 48, Issue 6, 2001, Pages 1495-1507

  Noble, Russell A ^b   Jones, Anthony D R ^b   Robertson, Toby J ^c   Hutchins, David A ^a,c   Billson, Duncan R ^c  

^a IEEE   (United Kingdom)

^b DEFENCE SCIENCE AND TECHNOLOGY LABORATORY   (United Kingdom)

^c UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

INTRINSIC STRESS; MEMBRANE SIZE; STATIC MEMBRANE DEFLECTION MEASUREMENT; ULTRASONIC VOLTAGE SOURCE;

BANDWIDTH; CALIBRATION; FABRICATION; HYDROPHONES; INTERFEROMETRY; MEMBRANES; MICROMACHINING; SILICON NITRIDE; STRESSES;

ULTRASONIC TRANSDUCERS;

ARTICLE; EQUIPMENT DESIGN; MEMBRANE; TRANSDUCER; ULTRASOUND;

EQUIPMENT DESIGN; MEMBRANES; TRANSDUCERS; ULTRASONICS;

EID: 0035498415     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.971699     Document Type: Article

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