Fabrication and characterization of surface micromachined capacitive ultrasonic immersion transducers

Journal of Microelectromechanical Systems

Volumn 8, Issue 1, 1999, Pages 100-113

  Jin, Xuecheng ^a,b,c   Ladabaum, Igal ^a,b,d   Levent Degertekin, F ^a,b   Calmes, Sam ^b   Khuri Yakub, Butrus T ^a,b  

^a IEEE   (United States)

^b STANFORD UNIVERSITY   (United States)

^c STANFORD UNIVERSITY   (United States)

^d ACOUSTICAL SOCIETY OF AMERICA   (United States)

Author keywords

Immersion transducer; Metallization; Surface micromachining; Ultrasonic transducer; Vacuum sealing

Indexed keywords

METALLIZING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SEALING (CLOSING); VACUUM APPLICATIONS;

IMMERSION TRANSDUCERS; VACUUM SEALING;

ULTRASONIC TRANSDUCERS;

EID: 0033098416     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.749409     Document Type: Article

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