Scanning probe microscope dimensional metrology at NIST

Measurement Science and Technology

Volumn 22, Issue 2, 2011, Pages

  Kramar, John A ^a   Dixson, Ronald ^a   Orji, Ndubuisi G ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

AFM; CD AFM; Linewidth; Nanometrology; Pitch; SPM; Step height; Traceable dimensional metrology; Uncertainty budget

Indexed keywords

ATOMIC FORCE MICROSCOPY; BUDGET CONTROL; LINEWIDTH; MOLECULAR PHYSICS; OPTICAL PROPERTIES; UNITS OF MEASUREMENT;

DIMENSIONAL METROLOGY; NANOMETROLOGY; PITCH; STEP HEIGHT; UNCERTAINTY BUDGET;

MICROSCOPES;

EID: 79251527882     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/22/2/024001     Document Type: Article

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