Active vibration isolation for a long range scanning tunneling microscope

Asian Journal of Control

Volumn 6, Issue 2, 2004, Pages 179-186

  Lan, Kuo Jung ^a   Yen, Jia Yush ^a   Kramar, John A ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Active vibration isolation; Linear quadratic Gaussian control (LQG); Mallock suspension system; Scanning tunneling microscope

Indexed keywords

EID: 4544275247     PISSN: 15618625     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1934-6093.2004.tb00196.x     Document Type: Article

References (14)