A compact, compound actuator for the molecular measuring machine

Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE

Volumn , Issue , 2008, Pages

  Li, Jing ^a   Shen, Yin Lin ^a   Jeong, Jaehwa ^b,c   Scire, Fredric E ^b   Kramar, John A ^b  

^a The George Washington University   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^c Korea University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84884911475     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. Kramar JA. Nanometre Resolution Metrology with the Molecular Measuring Machine. Measurement Science and Technology. 2005; 16(11): 2121-2128. (Pubitemid 41528777)
2. Woody S, Bauza M, Smith S., Thompson M. Single- and Multi-Sine DFT Demodulation with an Application to Precision Capacitive Sensors. Precision Engineering. 2008; 32(2): 79-87. (Pubitemid 351240987)
3. Ben-Israel A., Greville TNE. Generalized Inverses: Theory and Applications. John Wiley and Sons, Inc. New York: 1974.