Sliding mode control for active vibration isolation of a long range scanning tunneling microscope

Review of Scientific Instruments

Volumn 75, Issue 11, 2004, Pages 4367-4373

  Lan, Kuo Jung ^a   Yen, Jia Yush ^a   Kramar, John A ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE VIBRATION ISOLATION; MOLECULAR MEASURING MACHINE (M3); NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (NIST); PIEZO ACTUATORS;

ACTUATORS; ATTENUATION; COMPUTER SIMULATION; IMAGE ANALYSIS; SCANNING TUNNELING MICROSCOPY; SLIDING MODE CONTROL; VIBRATION CONTROL;

MOLECULAR PHYSICS;

EID: 10844259729     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1807005     Document Type: Article

References (10)

1. J. Kramar, E. Amatucci, D. Gilsinn, J. Jun, W. Penzes, F. Scire, E. C. Teague, and J. Villarrubia, SPIE Conference on Metrology, Inspection, and Process Control for Microlithography XIII, Santa Clara, California, 1999 pp. 1017-1028.
2. E. C. Teague, J. Vac. Sci. Technol. B 7, 1898 (1989).
3. D. Gilsinn, M. Lyons, F. Scire, E. C. Teague, E. Amatucci, and T. McIntyre, Draft National Institute of Standards and Technology Interagency Report 1991 (unpublished).
4. E. Anderson, D. Leo, and M. Holcomb, in Proceedings of the 19th Annual AAS Guidance and Control Conference. Breekenridge, CO, 1996.
5. Z. Geng and L. Hayes, IEEE Trans. Control Syst. Technol. 2, 45 (1994).
6. D. Thayer, J. Vagners, A von Flotow, C. Hardham, and K. Scribner, in Proeeedings of the 21st Anneal AAS Guidance and Control Conference, Breekenridge, Colorado, (1998), pp. 497-506.
7. R. S. Whipple, Trans. Opt. Soc., London 22, 48 (1920).
8. K. J. Lan, J. Y. Yen, and J. A. Kramear, Asian J. Control 6, 100 (2004).
9. F. L. Lewis and V. L. Syrmos, Optimal Control. 2nd ed (Wiley, New York, 1976), p. 161-196.
10. J. Little and C. Moler, computer code MATLAB (MathWorks, Inc., Natick, MA, 1984).