Re-calibration of the NIST SRM 2059 master standard using traceable atomic force microscope metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7122, Issue , 2008, Pages

  Dixson, Ronald ^a   Potzick, James ^a   Orji, Ndubuisi G ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Calibration; CD; Cd AFM; linewidth; Metrology; Photomask; SRM; SRM 2059; Standards; Traceability

Indexed keywords

CD; CD-AFM; METROLOGY; SRM; SRM 2059; TRACEABILITY;

ATOMIC FORCE MICROSCOPY; CALIBRATION; COMPARATORS (OPTICAL); DATA STORAGE EQUIPMENT; LINEWIDTH; MEASUREMENT THEORY; MICROSCOPES; OPTICAL DATA PROCESSING; PHOTOMASKS; RELUCTANCE MOTORS; SINGLE CRYSTALS; STANDARDS; THICKNESS MEASUREMENT; UNCERTAINTY ANALYSIS;

PHOTORESISTS;

EID: 62749133363     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.801923     Document Type: Conference Paper

References (19)

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