Advanced CD-AFM probe tip shape characterization for metrology accuracy and throughput

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6518, Issue PART 3, 2007, Pages

  Liu, Hao Chih ^a   Osborne, Jason R ^a   Osborn, Marc ^a   Dahlen, Gregory A ^a  

^a VEECO INSTRUMENTS INC   (United States)

Author keywords

Carbon nanotube; CD AFM; Characterizer; Metrology; Throughput; Tip shape

Indexed keywords

ATOMIC-SCALE RESOLUTION; CRITICAL DIMENSION ATOMIC FORCE MICROSCOPY (CD-AFM); CROSS-SECTION DATA; SCANNING PROBE GEOMETRY; SCATTEROMETER;

ATOMIC FORCE MICROSCOPY; CARBON NANOTUBES; COMPUTER SIMULATION; DATA STORAGE EQUIPMENT; PROBES; SEMICONDUCTOR DEVICES; TRANSMISSION ELECTRON MICROSCOPY; WEAR RESISTANCE;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 35148884841     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.710437     Document Type: Conference Paper

References (8)

1. J. S. Villarrubia, "Tip Characterization for Dimensional Nanometrology," in Applied Scanning Probe Methods. vol. 1, B. Bhushan, H. Fuchs, and S. Hosaka, Eds.: Springer, 2004, pp. 147-168.
2. G. Dahlen, M. Osborn, N. Okulan, W. Foreman, A. Chand, and J. Foucher, "Tip characterization and surface reconstruction of complex structures with critical dimension atomic force microscopy," JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B MICROELECTRONICS AND NANOMETER STRUCTURES, vol. 23, pp. 2297-2303, 2005.
3. G. A. Dahlen, M. Osborn, H.-C. Liu, R. Jain, W. Foreman, and J. R. Osborne, "Critical dimension AFM tip characterization and image reconstruction applied to the 45-nm node," in SPIE Microlithography, San Jose, 2006, p. 61522R.
4. H.-C. Liu, D. Fong, G. A. Dahlen, M. Osborn, S. Hand, and J. R. Osborne, "Carbon nanotube AFM probes for microlithography process control," in SPIE Miocrolithography, San Jose, 2006, p. 61522Y.
5. G. A. Dahlen, "CD AFM Measurements: Development of a Nanotube Characterizer," Veeco Instruments, Inc., Santa Barbara, internal white paper report June 25 2003.
6. J. D. Whittaker, M. Brink, G. A. Husseini, M. R. Linford, and R. C. Davis, "Self-aligned mechanical attachment of carbon nanotubes to silicon dioxide structures by selective silicon dioxide chemical-vapor deposition," Applied Physics Letters, vol. 83, pp. 5307-5309, 2003.
7. A. M. Cassell, N. R. Franklin, T. W. Tombler, E. M. Chan, J. Han, and H. Dai, "Directed Growth of Free-StandingSingle-Walled Carbon Nanotubes," Journal of American Chemistry Society, vol. 121, pp. 7975-7976, 1999.
8. [8[ M. Meyyappan, L. Delzeit, A. Cassell, and D. Hash, "Carbon nanotube growth by PECVD: a review," Plasma Sources Science and Technology, vol. 12, p. 205, 2003.