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Volumn 41, Issue 10, 2010, Pages 1234-1239

Raman studies on nanocomposite silicon carbonitride thin film deposited by r.f. magnetron sputtering at different substrate temperatures

Author keywords

Nanocomposite SiCN thin film; Raman spectroscopy; Sputtering

Indexed keywords

CARBON; FILM GROWTH; MAGNETRON SPUTTERING; NANOCOMPOSITE FILMS; NANOCOMPOSITES; NITROGEN COMPOUNDS; RAMAN SPECTROSCOPY; SILICON COMPOUNDS; SUBSTRATES;

EID: 78751474771     PISSN: 03770486     EISSN: 10974555     Source Type: Journal    
DOI: 10.1002/jrs.2588     Document Type: Article
Times cited : (25)

References (32)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.