Raman spectroscopy study of DLC films prepared by RF plasma and filtered cathodic arc

Surface and Coatings Technology

Volumn 201, Issue 15, 2007, Pages 6734-6736

  Ha, Peter C T ^a,b,c   McKenzie, D R ^a   Bilek, M M M ^a   Kwok, S C H ^a,b   Chu, P K ^b   Tay, B K ^c  

^a UNIVERSITY OF SYDNEY   (Australia)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^c NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Diamond like carbon; FCVA; Raman; RF

Indexed keywords

CARBON FILMS; CATHODIC PROTECTION; DELAMINATION; MULTILAYER FILMS; RAMAN SPECTROSCOPY; VAPOR DEPOSITION;

CARBON VAPOUR DEPOSITED FILMS; FILTERED CATHODIC ARC; PLASMA IMMERSION ION IMPLANTATION AND DEPOSITION (PIIID); RADIO-FREQUENCY PLASMA;

DIAMOND LIKE CARBON FILMS;

CARBON FILMS; CATHODIC PROTECTION; DELAMINATION; DIAMOND LIKE CARBON FILMS; MULTILAYER FILMS; RAMAN SPECTROSCOPY; VAPOR DEPOSITION;

EID: 33847396524     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.09.048     Document Type: Article

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