From diamond to crystalline silicon carbonitride: Effect of introduction of nitrogen in CH4/H2 gas mixture using MW-PECVD

Surface and Coatings Technology

Volumn 160, Issue 2-3, 2002, Pages 165-172

  Fu, Yongqing ^a   Sun, Chang Q ^a   Du, Hejun ^a   Yan, Bibo ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Diamond; MW PECVD; Nitrogen; Silicon carbon nitride

Indexed keywords

CARBON NITRIDE; CRYSTALS; DIAMONDS; SYNTHESIS (CHEMICAL); VAPOR DEPOSITION; X RAY PHOTOELECTRON SPECTROSCOPY;

CONTINUOUS FILMS;

SURFACE CHEMISTRY;

DIAMOND;

EID: 0037159169     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00418-8     Document Type: Article

References (23)