Effect of radio frequency and direct current modes of deposition on protective metallurgical hard silicon carbon nitride coatings by magnetron sputtering

Vacuum

Volumn 83, Issue 12, 2009, Pages 1464-1469

  Bhattacharyya, A S ^a   Das, G C ^b   Mukherjee, S ^b   Mishra, S K ^a  

^a NATIONAL METALLURGICAL LABORATORY   (India)

^b JADAVPUR UNIVERSITY   (India)

Author keywords

RF DC magnetron sputtering; Si C N coatings

Indexed keywords

ALTERNATING CURRENT; DIRECT CURRENT; MECHANICAL BEHAVIOR; MECHANICAL PERFORMANCE; RADIO FREQUENCIES; RF-DC MAGNETRON SPUTTERING; SCRATCH RESISTANCE; SCRATCH TEST; SI-C-N COATINGS; SILICON (100); SILICON CARBON NITRIDE; STATIC INDENTATION; STRUCTURE-PROPERTY CORRELATION;

MAGNETRON SPUTTERING; MAGNETRONS; MECHANICAL PROPERTIES; NITRIDES; RADIO; RADIO WAVES; SILICON;

HARD COATINGS;

EID: 67651017514     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.06.051     Document Type: Article

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