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Volumn , Issue 3, 2009, Pages 108-114
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Hot properties
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS CARBON;
AMORPHOUS FILMS;
AMORPHOUS SILICON;
CARBON FILMS;
DESORPTION;
ELECTRODEPOSITION;
HARDNESS;
MAGNETRON SPUTTERING;
MAGNETRONS;
MICROCRYSTALLINE SILICON;
SILICON;
STAINLESS STEEL;
SUBSTRATES;
THERMAL EFFECTS;
TRANSMISSION ELECTRON MICROSCOPY;
BOROSILICATE GLASS SUBSTRATES;
CRYSTALLINE FEATURES;
MICROSTRUCTURAL EXAMINATIONS;
NUCLEATION AND GROWTHS;
RF MAGNETRONS;
RF- MAGNETRON SPUTTERING;
SI(1 0 0 );
SUBSTRATE TEMPERATURES;
TEM;
TEMPERATURE CHANGES;
BOROSILICATE GLASS;
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EID: 62549127285
PISSN: 09303847
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Article |
Times cited : (12)
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References (16)
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