Synthesis of metastable carbon-silicon-nitrogen compounds by ion implantation

Journal of Electronic Materials

Volumn 25, Issue 1, 1996, Pages 23-26

  Uslu, C ^a   Park, B ^a   Poker, D B ^b  

^a Georgia Institute of Technology ^*  (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

Carbon silicon nitride; Ion implantation; SiC

Indexed keywords

ION IMPLANTATION; SILICON CARBIDE; SYNTHESIS (CHEMICAL); THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

CARBON SILICON NITRIDES; CUBIC PHASE;

CARBON INORGANIC COMPOUNDS;

EID: 0029679196     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02666169     Document Type: Article

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