A novel technique for microfabrication of ultra-thin affinity cantilevers for characterization with an AFM

Journal of Micromechanics and Microengineering

Volumn 20, Issue 12, 2010, Pages

  Joshi, Manoj ^a   Rao, V Ramgopal ^a   Mukherji, Soumyo ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; ATOMIC FORCE MICROSCOPES; BIOSENSOR APPLICATIONS; DEEP REACTIVE ION ETCHING; LASER DICING; MICRO-FABRICATION TECHNIQUES; NOVEL TECHNIQUES; PROCESS YIELD; SURFACE FUNCTIONALIZATION; ULTRA-THIN;

BIOSENSORS; MECHANICAL PROPERTIES; MICROANALYSIS; MICROFABRICATION; MICROMACHINING; NANOCANTILEVERS;

REACTIVE ION ETCHING;

EID: 78649739404     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/12/125007     Document Type: Article

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