Non-contact AFM with a nanoindentation technique for measuring the mechanical properties of thin films

Nanotechnology

Volumn 15, Issue 8, 2004, Pages 1017-1022

  Chowdhury, S ^a   Laugier, M T ^a  

^a UNIVERSITY OF LIMERICK   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON NITRIDE; GRAPHITE; HARDNESS; INERT GASES; MAGNETRON SPUTTERING; NANOTECHNOLOGY; NITROGEN; RAMAN SPECTROSCOPY;

FOCUSED ION BEAMS (FIB); NANOINDENDATION; SHADING; THERMAL DRIFTS;

THIN FILMS;

EID: 4344578571     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/15/8/027     Document Type: Article

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