Externally resonated linear microvibromotor for microassembly

Journal of Microelectromechanical Systems

Volumn 9, Issue 3, 2000, Pages 336-346

  Saitou, Kazuhiro ^a   Wang, Dung An ^a   Wou, Soungjin J ^a,b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b Bishop Steering Technology   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPOSITE MICROMECHANICS; COMPUTER SIMULATION; CRYSTAL RESONATORS; ELECTROSTATICS; MATHEMATICAL MODELS; MICROACTUATORS; MICROMACHINING; POLYSILANES; SUBSTRATES; VIBRATIONS (MECHANICAL);

ELECTROSTATIC COMB ACTUATORS; LINEAR MICROVIBROMOTORS; MICROCANTILEVER IMPACTERS; MICROLINEAR SLIDERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0034270475     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.870060     Document Type: Article

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