Fabrication and characterization of SiO2 microcantilever for microsensor application

Sensors and Actuators, B: Chemical

Volumn 97, Issue 1, 2004, Pages 109-113

  Tang, Yanjun ^a   Fang, Ji ^a   Yan, Xiaodong ^a   Ji, Hai Feng ^a  

^a LOUISIANA TECH UNIVERSITY   (United States)

Author keywords

Chemical sensors; Plasma dry etching; Significant amplitude; SiO2 cantilever; Spring constant

Indexed keywords

ADSORPTION; BIODIVERSITY; BIOSENSORS; CHEMICAL SENSORS; ETCHING; SELF ASSEMBLY; SILICON COMPOUNDS; STRESSES; SYNTHESIS (CHEMICAL); THICKNESS MEASUREMENT;

MICROCANTILEVERS; MOLECULAR BINDING; PLASMA DRY ETCHING;

MICROSENSORS;

EID: 0346280065     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2003.08.003     Document Type: Article

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