Fabrication of Si nanocrystals in an amorphous SiC matrix by magnetron sputtering

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 42, Issue 9, 2010, Pages 2358-2363

  Gencer Imer, A ^a   Yildiz, I ^a   Turan, R ^a  

^a MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

Author keywords

Nanocrystals; Si; SiC; Third generation solar cells

Indexed keywords

ANNEALING TEMPERATURES; DC POWER; ELECTRONIC DEVICE; EXCESS SI; HIGH-TEMPERATURE ANNEALING; MATRIX; MEAN SIZE; NANOCRYSTAL FORMATION; PROCESS PARAMETERS; RF-MAGNETRON SPUTTERING; SI; SI CONTENT; SI NANOCRYSTAL; SI-SI BONDS; SIC; SIC FILMS; TEM; THEORETICAL LIMITS; THIRD GENERATION; WIDE BAND-GAP MATERIAL; XPS;

ANNEALING; BOND STRENGTH (CHEMICAL); DC POWER TRANSMISSION; DEPTH PROFILING; ELECTRIC POWER MEASUREMENT; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; NANOCRYSTALS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE; SOLAR CELLS; STOICHIOMETRY;

AMORPHOUS SILICON;

EID: 77955307849     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physe.2010.05.013     Document Type: Article

References (33)

1. A. Henry, I.G. Ivanov, T. Egilsson, C. Hallin, A. Ellison, O. Kordina, U. Lindefelt, and E. Janzen Diamond Relat. Mater. 6 1997 1289
2. H. Morkoc, S. Strite, G.B. Gao, M.E. Lin, B. Svertlov, and M. Burns J. Appl. Phys. 76 1994 1363
3. G. Conibeer, M. Green, R. Corkisch, Y. Cho, E.-C. Cho, C.-W. Jiang, T. Fangsuwannarak, E. Pink, Y. Huang, T. Puzzer, T. Trupke, B. Richards, A. Shavalav, and K.-L. Lin Thin Solid Films 511512 2006 654
4. D. Song, E.-C. Cho, Y.-H. Cho, G. Conibeer, Y. Huang, S. Huang, and M.A. Green Thin Solid Films 516 2008 3824
5. E.-C. Cho, M.A. Green, G. Conibeer, D. Song, Y.-H. Cho, G. Scardera, S. Huang, S. Park, X.J. Hao, Y. Huang, and L.V. Dao Adv. Optoelectron. 2007 2007 69578
6. C.-W. Jiang, and M.A. Green J. Appl. Phys. 99 2006 114902/1
7. E.-C. Cho, S. Park, X.J. Hao, D. Song, G. Conibeer, S.C. Park, and M.A. Green Nanotechnol. 19 2008 245201/1
8. Y. Kurokava, S. Tomita, S. Miyajima, A. Yamada, and M. Konagai Jpn. J. Appl. Phys. 46 2007 L833
9. U. Serincan, G. Aygun, and R. Turan J. Lumin. 113 2005 229
10. D. Barba, F. Martin, C. Dahmoune, and G.G. Ross Appl. Phys. Lett. 89 2006 034107/1
11. D. Riabinina, C. Durand, J. Margot, M. Chaker, G.A. Botton, and F. Rosei J. Phys. Rev. B 74 2006 075334/1
12. S. Takeoka, M. Fujii, and S. Hayashi Phys. Rev. B 62 2000 16820
13. N.A.P. Mogaddam, A.S. Alagoz, S. Yerci, R. Turan, S. Foss, and T.G. Finstand J. Appl. Phys. 104 2008 124309/1
14. M. Zacharias, J. Heitman, R. Scholz, U. Kahler, and M. Schmidt Appl. Phys. Lett. 80 2002 661
15. D. Song, E.-C. Cho, G. Conibeer, Y.-H. Cho, Y. Huang, S. Huang, C. Flynn, and M.A. Green J. Vac. Sci. Technol. B: Microelectron. Nanometer Struct. Process. Meas. Phenom. 25 2007 1327
16. Y. Kurokava, S. Miyajima, A. Yamada, and M. Konagai Jpn. J. Appl. Phys. 45 2006 L1064
17. A. Mahmood, S. Muhl, R. Machorro, A. Lausa, J. Esteve, and J. Heiras Diamond Relat. Mater. 15 2006 71
18. Q.J. Cheng, S. Xu, J.W. Chai, S.Y. Huang, Y.P. Ren, J.D. Long, P.P. Rutkevych, and K. Ostrikov Thin Solid Films 516 2008 5991
19. N.A.E. Forhan, M.C.A. Fantini, and I. Preyra J. Non-Cryst. Solids 338340 2004 119
20. R.J. Prado, T.F. D'Addio, M.C.A. Fantini, I. Preyra, and A.M. Flank J. Non-Cryst. Solids 330 2003 196
21. Y. Wang, H. Wang, and G. Ma Thin Solid Films 335 1998 249
22. Y. Wang, J. Lin, C.H.A. Huan, Z.C. Feng, and S.J. Chua Thin Solid Films 384 2001 173
23. M. Losurdo, M. Giangregorio, P. Capezzuto, G. Bruno, and F. Giorgis J. Appl. Phys. 97 2005 103504/1
24. D. Gracin, K. Juraic, P. Dubcek, A. Gajovic, and S. Bernstorff Appl. Surf. Sci. 252 2006 5598
25. M. Marinow, and N. Zotov Phys. Rew. B 55 1997 2938
26. T. Rajagopalan, X. Wang, B. Lahlouh, C. Ramkumar, P. Dutta, and S. Gangopadhyay J. Appl. Phys. 94 2003 5252
27. D. Song, E.-C. Cho, G. Conibeer, Y. Huang, C. Flynn, and M. Green J. Appl. Phys. 103 2008 083544/1
28. U. Serincan, G. Kartopu, A. Guennes, T.G. Finstand and R. Turan, Y. Ekinci, S.C. Bayliss, Semicond. Sci. Technol. 19 (2004) 247
29. Q.J. Cheng, and S. Xua J. Appl. Phys. 102 2007 056101/1
30. I. Dogan, I. Yildiz, and R Turan Physica E 41 2009 976
31. M. Wang, A.P. Huang, P.K. Chu, B. Wang, and H. Yan Diamond Relat. Mater. 16 2006 826
32. S. Yerci, U. Serincan, I. Dogan, M. Genisel, A. Aydinli, and R. Turan J. Appl. Phys. 100 2006 074301/1
33. N. Kikuchi, E. Kusano, T. Tanaka, A. Kinbara, and H. Nanto Surf. Coat. Technol. 149 2002 76