Nucleation and growth of Si nanocrystals in an amorphous Si O2 matrix

Physical Review B - Condensed Matter and Materials Physics

Volumn 74, Issue 7, 2006, Pages

  Riabinina, Daria ^a   Durand, Christophe ^a   Margot, Joëlle ^b   Chaker, Mohamed ^a   Botton, Gianluigi A ^c   Rosei, Federico ^a  

^a INRS EMT   (Canada)

^b UNIVERSITÉ DE MONTRÉAL   (Canada)

^c MCMASTER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33748142946     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.74.075334     Document Type: Article

References (30)

1. H. Takagi, H. Ogawa, Y. Yamazaki, A. Ishizaki, and T. Nakagiri, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.102921 56, 2379 (1990).
2. L. T. Canham, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.103561 57, 1046 (1990).
3. L. Pavesi, L. Dal Negro, C. Mazzoleni, G. Franzo, and F. Priolo, Nature (London) NATUAS 0028-0836 10.1038/35044012 408, 440 (2000).
4. D. F. Perepichka and F. Rosei, Small SMALBC 1613-6810 10.1002/smll.200500276 2, 22 (2006).
5. M. De Crescenzi, P. Castrucci, M. Scarselli, M. Diociaiuti, P. S. Chaudhari, C. Balasubramanian, T. M. Bhave, and S. V. Bhoraskar, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1943497 86, 231901 (2005).
6. S. Guha, M. D. Pace, D. N. Dunn, I. L. Singer, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.118275 70, 1207 (1997).
7. D. Pacifici, G. Franzo, F. Priolo, F. Iacona, and L. Dal Negro, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.67.245301 67, 245301 (2005).
8. D. Riabinina, C. Durand, M. Chaker, and F. Rosei, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.2174096 88, 073105 (2006).
9. S. Takeoka, M. Fujii, and S. Hayashi, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.62.16820 62, 16820 (2000).
10. J. K. Bording and J. Taftoo, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.62.8098 62, 8098 (2000).
11. P. R. ten Wolde, M. J. Ruiz-Montero, and D. Frenkel, J. Chem. Phys. JCPSA6 0021-9606 10.1063/1.471721 104, 9932 (1996).
12. F. H. Stillinger and T. A. Weber, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.31.5262 31, 5262 (1985).
13. P. Beaucage and N. Mousseau, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.71.094102 71, 094102 (2005).
14. J. Tersoff, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.38.9902 38, 9902 (1988).
15. M. C. Ridgway, G. D. Azevedo, C. J. Glover, R. G. Elliman, D. J. Llewellyn, A. Cheung, B. Johannessen, D. A. Brett, and G. J. Foran, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X 10.1016/j.nimb.2004.01.004 218, 421 (2004).
16. S. Guha, S. B. Qadri, R. G. Musket, M. A. Wall, and T. Shimizu-Iwayama, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1308096 88, 3954 (2000).
17. S. Guha, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.368812 84, 5210 (1998).
18. S. Takeoka, M. Fujii, S. Hayashi, and K. Yamamoto, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.58.7921 58, 7921 (1998).
19. A. V. Kabashin, J.-P. Sylvestre, S. Patskovsky, and M. Meunier, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1446217 91, 3248 (2002).
20. L. Patrone, D. Nelson, V. I. Safarov, M. Sentis, and W. Marine, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.372421 87, 3829 (2000).
21. C. Li, K. Kondo, T. Makimura, and K. Murakami, Appl. Surf. Sci. ASUSEE 0169-4332 10.1016/S0169-4332(02)00407-5 197, 607 (2002).
22. F. J. Himpsel, F. R. McFeely, A. Taleb-Ibrahimi, J. A. Yarmoff, and G. Hollinger, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.38.6084 38, 6084 (1988).
23. M. L. Green, E. P. Gusev, R. Degraeve, and E. L. Garfunkel, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1385803 90, 2057 (2001).
24. The uncertainty of quantitative XPS analysis is about ±10% [Practical Surface Analysis, 2nd ed, edited by, D. Briggs, and, M. P. Seah, (Wiley, Chichester, 1990), Vol. 1]. We have taken this uncertainty into account for nonoxidized concentration fraction C Si0 and the corresponding error bar on Si0 volume fraction f Si0 has also been considered (Table 1).
25. E. Van de Riet, C. J. C. M. Nillesen, and J. Dieleman, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.354763 74, 2008 (1993).
26. D. Riabinina, F. Rosei, and M. Chaker, J. Exp. Nanosci. ZZZZZZ 1745-8080 1, 83 (2005).
27. Introduction to X-ray Powder Diffractometry, edited by, R. Jenkins, and, R. L. Snyder, (Wiley, New York, 1996).
28. V. A. Dan'ko, I. Z. Indutny, V. S. Lysenko, I. Yu. Madanchuk, V. I. Min'ko, A. N. Nazarov, A. S. Tkachenko, and P. E. Shepelyavy, Semiconductors SMICES 1063-7826 10.1134/1.2085270 39, 1197 (2005).
29. J. C. Aubry, T. Tyliszczak, A. P. Hitchcock, J.-M. Baribeau, and T. E. Jackman, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.59.12872 59, 12872 (1999).
30. R. A. B. Devine and J. Arndt, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.35.9376 35, 9376 (1987).