Evolution of Si (and SiC) nanocrystal precipitation in SiC matrix

Thin Solid Films

Volumn 516, Issue 12, 2008, Pages 3824-3830

  Song, Dengyuan ^a   Cho, Eun Chel ^a   Cho, Young Hyun ^a   Conibeer, Gavin ^a   Huang, Yidan ^a   Huang, Shujuan ^a   Green, Martin A ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

Annealing; Infrared spectroscopy; Raman spectroscopy; Silicon carbide; Silicon nanocrystal; Sputtering; X ray photoelectron spectroscopy

Indexed keywords

ANNEALING; INFRARED SPECTROSCOPY; RAMAN SPECTROSCOPY; SILICON CARBIDE; SPUTTERING; X RAY PHOTOELECTRON SPECTROSCOPY;

SI ATOMIC RATIOS; SILICON NANOCRYSTAL;

NANOCRYSTALS;

EID: 40749114671     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.06.150     Document Type: Article

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