메뉴 건너뛰기




Volumn 4, Issue 2, 2009, Pages 1-15

Exploration of new concepts for mass detection in electrostatically-actuated structures based on nonlinear phenomena

Author keywords

Dynamic pull in; Electrostatic force; Escape phenomenon; Mass and gas sensors; MEMS; Switches

Indexed keywords

AC HARMONICS; AC LOAD; ACTUATED STRUCTURES; BASIC IDEA; BASIC PRINCIPLES; CAPACITIVE SENSOR; DYNAMIC INSTABILITY; ELECTRICAL SIGNAL; ELECTROMECHANICAL SWITCHES; ELECTROSTATIC LOAD; EXCITATION METHODS; GAS SENSORS; GLOBAL BIFURCATIONS; JUMP PHENOMENON; LOCAL BIFURCATIONS; MASS DETECTION; MASS SENSING; MASS SENSOR; MEMS SWITCHES; MICRO BEAMS; MICRO ELECTRO MECHANICAL SYSTEM; NEW CONCEPT; NON-LINEAR PHENOMENA; NONLINEAR FORCING; NOVEL METHODS; PARALLEL PLATES; PITCHFORK BIFURCATIONS; POTENTIAL WELLS; PRIMARY RESONANCE; PULL-IN; REDUCED ORDER MODELS; SMART SWITCH; SUBHARMONIC RESONANCES; TIME INTEGRATION;

EID: 77955301057     PISSN: 15551415     EISSN: 15551423     Source Type: Journal    
DOI: 10.1115/1.3079785     Document Type: Article
Times cited : (107)

References (53)
  • 2
    • 0036646553 scopus 로고    scopus 로고
    • Complementary Metal Oxide Semiconductor Cantilever Arrays on a Single Chip: Mass-Sensitive Detection of Volatile Organic Compounds
    • Lange, D., Hagleitner, C., Hierlemann, A., Brand, O., and Baltes, H., 2002, "Complementary Metal Oxide Semiconductor Cantilever Arrays on a Single Chip: Mass-Sensitive Detection of Volatile Organic Compounds," Anal. Chem., 74, pp. 3084-3095.
    • (2002) Anal. Chem. , vol.74 , pp. 3084-3095
    • Lange, D.1    Hagleitner, C.2    Hierlemann, A.3    Brand, O.4    Baltes, H.5
  • 3
    • 0034613433 scopus 로고    scopus 로고
    • Selectivity of Chemical Sensors Based on Micro-Cantilevers Coated With Thin Polymer Films
    • Betts, T. A., Tipple, C. A., Sepaniak, M. J., and Datskos, P. G., 2000, "Selectivity of Chemical Sensors Based on Micro-Cantilevers Coated With Thin Polymer Films," Anal. Chim. Acta, 422, pp. 89-99.
    • (2000) Anal. Chim. Acta , vol.422 , pp. 89-99
    • Betts, T.A.1    Tipple, C.A.2    Sepaniak, M.J.3    Datskos, G.4
  • 5
    • 36449004873 scopus 로고
    • Detection of Mercury Vapor Using Resonating Micro-Cantilevers
    • Thundat, T., Wachter, E. A., Sharp, S. L., and Warmack, R. J., 1995, "Detection of Mercury Vapor Using Resonating Micro-Cantilevers," Appl. Phys. Lett., 66, pp. 1695-1697.
    • (1995) Appl. Phys. Lett. , vol.66 , pp. 1695-1697
    • Thundat, T.1    Wachter, E.A.2    Sharp, S.L.3    Warmack, R.J.4
  • 6
    • 85008006714 scopus 로고    scopus 로고
    • Effect of Coating Viscoelasticity on Quality Factor and Limit of Detection of Microcantilever Chemical Sensors
    • Dufour, I., Lochon, F., Heinrich, S., Josse, F., and Rebière, D., 2007, "Effect of Coating Viscoelasticity on Quality Factor and Limit of Detection of Microcantilever Chemical Sensors," IEEE Sens. J., 7(2), pp. 230-236.
    • (2007) IEEE Sens. J. , vol.7 , Issue.2 , pp. 230-236
    • Dufour, I.1    Lochon, F.2    Heinrich, S.3    Josse, F.4    Rebière, D.5
  • 8
    • 32844455386 scopus 로고    scopus 로고
    • Silicon Made Resonant Microcantilever: Dependence of the Chemical Sensing Performances on the Sensitive Coating Thickness
    • Lochon, F., Fadel, L., Dufour, I., Rebiere, D., and Pistre, J., 2006, "Silicon Made Resonant Microcantilever: Dependence of the Chemical Sensing Performances on the Sensitive Coating Thickness," Mater. Sci. Eng., C, 26(2-3), pp. 348-353.
    • (2006) Mater. Sci. Eng., C , vol.26 , Issue.2-3 , pp. 348-353
    • Lochon, F.1    Fadel, L.2    Dufour, I.3    Rebiere, D.4    Pistre, J.5
  • 9
    • 4544387347 scopus 로고    scopus 로고
    • Chemical Sensing: Millimeter Size Resonant Microcantilever Performance
    • Fadel, L., Lochon, F., Dufour, I., and Francais, O., 2004, "Chemical Sensing: Millimeter Size Resonant Microcantilever Performance," J. Micromech. Microeng., 14, pp. S23-S30.
    • (2004) J. Micromech. Microeng. , vol.14
    • Fadel, L.1    Lochon, F.2    Dufour, I.3    Francais, O.4
  • 10
    • 33745432251 scopus 로고    scopus 로고
    • Ultrasensitive Mass Detection Using Mode Localization in Coupled Microcantilevers
    • Spletzer, M., Wu, Q., Raman, A., Xu, X., and Reifenberger, R., 2006, "Ultrasensitive Mass Detection Using Mode Localization in Coupled Microcantilevers," Appl. Phys. Lett., 88, p. 254102.
    • (2006) Appl. Phys. Lett. , vol.88 , pp. 254102
    • Spletzer, M.1    Wu, Q.2    Raman, A.3    Xu, X.4    Reifenberger, R.5
  • 14
    • 1842788500 scopus 로고    scopus 로고
    • Single Virus Particle Mass Detection Using Microresonators With Nanoscale Thickness
    • Gupta, A., Akin, D., and Bashir, R., 2004, "Single Virus Particle Mass Detection Using Microresonators With Nanoscale Thickness," Appl. Phys. Lett., 84, pp. 1976-1978.
    • (2004) Appl. Phys. Lett. , vol.84 , pp. 1976-1978
    • Gupta, A.1    Akin, D.2    Bashir, R.3
  • 15
    • 3843119792 scopus 로고    scopus 로고
    • Cantilever Transducers as a Platform for Chemical and Biology Sensors
    • Lavrik, N. V., Sepaniak, M. J., and Datskos, P. G., 2004, "Cantilever Transducers as a Platform for Chemical and Biology Sensors," Rev. Sci. Instrum., 75, pp. 2229-2253.
    • (2004) Rev. Sci. Instrum. , vol.75 , pp. 2229-2253
    • Lavrik, N.V.1    Sepaniak, M.J.2    Datskos, G.3
  • 16
    • 0037348256 scopus 로고    scopus 로고
    • Mass Sensing of Adsorbed Molecules in Sub-Picogram Sample With Ultrathin Silicon Resonator
    • Ono, T., Li, X. X., Miyashita, H., and Esashi, M., 2003, "Mass Sensing of Adsorbed Molecules in Sub-Picogram Sample With Ultrathin Silicon Resonator," Rev. Sci. Instrum., 74, pp. 1240-1243.
    • (2003) Rev. Sci. Instrum. , vol.74 , pp. 1240-1243
    • Ono, T.1    Li, X.X.2    Miyashita, H.3    Esashi, M.4
  • 17
    • 3042783205 scopus 로고    scopus 로고
    • Ultrasensitive Nanoelectromechanical Mass Detection
    • Ekinci, K. L., Huang, X. M. H., and Roukes, M. L., 2004, "Ultrasensitive Nanoelectromechanical Mass Detection," Appl. Phys. Lett., 84, pp. 4469-4471.
    • (2004) Appl. Phys. Lett. , vol.84 , pp. 4469-4471
    • Ekinci, K.L.1    Huang, X.M.H.2    Roukes, M.L.3
  • 20
    • 1642293269 scopus 로고    scopus 로고
    • Ultimate Limits to Inertial Mass Sensing Based Upon Nanoelectromechanical Systems
    • Ekinci, K. L., Yang, Y. T., and Roukes, M. L., 2004, "Ultimate Limits to Inertial Mass Sensing Based Upon Nanoelectromechanical Systems," J. Appl. Phys., 95, pp. 2682-2689.
    • (2004) J. Appl. Phys. , vol.95 , pp. 2682-2689
    • Ekinci, K.L.1    Yang, Y.T.2    Roukes, M.L.3
  • 21
    • 0033732621 scopus 로고    scopus 로고
    • Mechanical Behavior of Ultrathin Microcantilever, Sens. Actuators
    • Yang, J., Ono, T., and Esashi, M., 2000, "Mechanical Behavior of Ultrathin Microcantilever," Sens. Actuators, A, 82, pp. 102-107.
    • (2000) A , vol.82 , pp. 102-107
    • Yang, J.1    Ono, T.2    Esashi, M.3
  • 22
    • 0037545846 scopus 로고    scopus 로고
    • Femtogram Mass Detection Using Photothermally Actuated Nanomechanical Resonators
    • Lavrik, N. V., and Datskos, P. G., 2003, "Femtogram Mass Detection Using Photothermally Actuated Nanomechanical Resonators," Appl. Phys. Lett., 82, pp. 2697-2699.
    • (2003) Appl. Phys. Lett. , vol.82 , pp. 2697-2699
    • Lavrik, N.V.1    Datskos, G.2
  • 24
    • 33744492070 scopus 로고    scopus 로고
    • High-Mode Resonant Piezoresistive Cantilever Sensors for Tens-Femtogram Resoluble Mass Sensing in Air
    • Jin, D., Li, X., Liu, J., Zuo, G., Wang, Y., Liu, M., and Yu, H., 2006, "High-Mode Resonant Piezoresistive Cantilever Sensors for Tens-Femtogram Resoluble Mass Sensing in Air," J. Micromech. Microeng., 16(5), pp. 1017-1023.
    • (2006) J. Micromech. Microeng. , vol.16 , Issue.5 , pp. 1017-1023
    • Jin, D.1    Li, X.2    Liu, J.3    Zuo, G.4    Wang, Y.5    Liu, M.6    Yu, H.7
  • 25
    • 28444444924 scopus 로고    scopus 로고
    • High Resonant Mass Sensor Evaluation: An Effective Method
    • Tseytlin, Y. M., 2005, "High Resonant Mass Sensor Evaluation: An Effective Method," Rev. Sci. Instrum., 76, p. 115101.
    • (2005) Rev. Sci. Instrum. , vol.76 , pp. 115101
    • Tseytlin, Y.M.1
  • 28
    • 19744377305 scopus 로고    scopus 로고
    • An Alternative Solution to Improve Sensitivity of Resonant Microcantilever Chemical Sensors: Comparison Between Using High-Order Modes and Reducing Dimensions
    • Lochon, F., Dufour, I., and Rebière, D., 2005, "An Alternative Solution to Improve Sensitivity of Resonant Microcantilever Chemical Sensors: Comparison Between Using High-Order Modes and Reducing Dimensions," Sens. Actuators B, 108(1-2), pp. 979-985.
    • (2005) Sens. Actuators B , vol.108 , Issue.1-2 , pp. 979-985
    • Lochon, F.1    Dufour, I.2    Rebière, D.3
  • 29
    • 33745604726 scopus 로고
    • Adsorption-Induced Surface Stress and Its Effects on Resonance Frequency of Microcantilevers
    • Chen, G., Thundat, T., Wachter, E., and Warmack, R., 1995, "Adsorption-Induced Surface Stress and Its Effects on Resonance Frequency of Microcantilevers," J. Appl. Phys., 77, pp. 3618-3622.
    • (1995) J. Appl. Phys. , vol.77 , pp. 3618-3622
    • Chen, G.1    Thundat, T.2    Wachter, E.3    Warmack, R.4
  • 30
    • 33846062124 scopus 로고    scopus 로고
    • CMOS Micromachined Capacitive Cantilevers for Mass Sensing
    • Li, Y., Ho, M., Hung, S., Chen, M., and Lu, C., 2006, "CMOS Micromachined Capacitive Cantilevers for Mass Sensing," J. Micromech. Microeng., 16(1), pp. 2659-2665.
    • (2006) J. Micromech. Microeng. , vol.16 , Issue.1 , pp. 2659-2665
    • Li, Y.1    Ho, M.2    Hung, S.3    Chen, M.4    Lu, C.5
  • 31
    • 23844450347 scopus 로고    scopus 로고
    • Electrostatically Actuated Resonant Microcantilever Beam in CMOS Technology for the Detection of Chemical Weapons
    • Voiculescu, I., Zaghloul, M., McGill, R., Houser, E., and Fedder, G., 2005, "Electrostatically Actuated Resonant Microcantilever Beam in CMOS Technology for the Detection of Chemical Weapons," IEEE Sens. J., 5(4), pp. 641-647.
    • (2005) IEEE Sens. J. , vol.5 , Issue.4 , pp. 641-647
    • Voiculescu, I.1    Zaghloul, M.2    McGill, R.3    Houser, E.4    Fedder, G.5
  • 32
    • 22844431559 scopus 로고    scopus 로고
    • Application of Parametric Resonance Amplification in a Single-Crystal Silicon Micro-Oscillator Based Mass Sensor
    • Zhang, W., and Turner, K. L., 2005, "Application of Parametric Resonance Amplification in a Single-Crystal Silicon Micro-Oscillator Based Mass Sensor," Sens. Actuators, A, 122, pp. 23-30.
    • (2005) Sens. Actuators A , vol.122 , pp. 23-30
    • Zhang, W.1    Turner, K.L.2
  • 33
    • 0036896806 scopus 로고    scopus 로고
    • Effect of Cubic Nonlinearity on Auto-Parametrically Amplified Resonant MEMS Mass Sensor
    • Zhang, W., Baskaran, R., and Turner, K. L., 2002, "Effect of Cubic Nonlinearity on Auto-Parametrically Amplified Resonant MEMS Mass Sensor," Sens. Actuators, A, 102(1-2), pp. 39-150.
    • (2002) Sens. Actuators A , vol.102 , Issue.1-2 , pp. 39-150
    • Zhang, W.1    Baskaran, R.2    Turner, K.L.3
  • 34
    • 77955289250 scopus 로고    scopus 로고
    • A Solid State Sensor, Actuator and Microsystems Workshop Hilton Head Island, SC
    • Zhang, W., and Turner, K. L., 2004, "A Mass Sensor Based on Parametric Resonance," A Solid State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, SC, p. 49.
    • (2004) A Mass Sensor Based on Parametric Resonance , pp. 49
    • Zhang, W.1    Turner, K.L.2
  • 36
    • 0035848170 scopus 로고    scopus 로고
    • Manipulation and Controlled Amplification of Brownian Motion of Microcantilever Sensors
    • Mehta, A., Cherian, S., Hedden, D., and Thundat, T., 2001, "Manipulation and Controlled Amplification of Brownian Motion of Microcantilever Sensors," Appl. Phys. Lett., 78, pp. 1637-1639.
    • (2001) Appl. Phys. Lett. , vol.78 , pp. 1637-1639
    • Mehta, A.1    Cherian, S.2    Hedden, D.3    Thundat, T.4
  • 38
    • 84921065746 scopus 로고    scopus 로고
    • RF MEMS: Theory, Design
    • Wiley, New York
    • Rebeiz, G. M., 2003, RF MEMS: Theory, Design, and Technology, Wiley, New York.
    • (2003) and Technology
    • Rebeiz, G.M.1
  • 39
    • 33846559280 scopus 로고    scopus 로고
    • Dynamic Pull-In Phenomenon in MEMS Resonators
    • Nayfeh, A. H., Younis, M. I., and Abdel-Rahman, E. M., 2007, "Dynamic Pull-In Phenomenon in MEMS Resonators," Nonlinear Dyn., 48, pp. 153-163.
    • (2007) Nonlinear Dyn , vol.48 , pp. 153-163
    • Nayfeh, A.H.1    Younis, M.I.2    Abdel-Rahman, E.M.3
  • 40
    • 24644513877 scopus 로고    scopus 로고
    • Dynamics of MEMS Resonators Under Superharmonic and Subharmonic Excitations
    • Nayfeh, A. H., and Younis, M. I., 2005, "Dynamics of MEMS Resonators Under Superharmonic and Subharmonic Excitations," J. Micromech. Microeng., 15, pp. 1840-1847.
    • (2005) J. Micromech. Microeng. , vol.15 , pp. 1840-1847
    • Nayfeh, A.H.1    Younis, M.I.2
  • 41
    • 0242636509 scopus 로고    scopus 로고
    • A Reduced-Order Model for Electrically Actuated Microbeam-Based MEMS
    • Younis, M. I., Abdel-Rahman, E. M., and Nayfeh, A. H., 2003, "A Reduced-Order Model for Electrically Actuated Microbeam-Based MEMS," J. Microelectromech. Syst., 12, pp. 672-680.
    • (2003) J. Microelectromech. Syst. , vol.12 , pp. 672-680
    • Younis, M.I.1    Abdel-Rahman, E.M.2    Nayfeh, A.H.3
  • 42
    • 21844478095 scopus 로고    scopus 로고
    • Reduced-Order Models for MEMS Applications
    • Nayfeh, A. H., Younis, M. I., and Abdel-Rahman, E. M., 2005, "Reduced-Order Models for MEMS Applications," Nonlinear Dyn., 41, pp. 211-236.
    • (2005) Nonlinear Dyn , vol.41 , pp. 211-236
    • Nayfeh, A.H.1    Younis, M.I.2    Abdel-Rahman, E.M.3
  • 43
    • 77955295699 scopus 로고    scopus 로고
    • www.wolfram.com.
  • 48
    • 31344452687 scopus 로고    scopus 로고
    • Control of Pull-In Dynamics in a Nonlinear Thermoelastic Electrically Actuated Microbeam
    • Lenci, S., and Rega, G., 2006, "Control of Pull-In Dynamics in a Nonlinear Thermoelastic Electrically Actuated Microbeam," J. Micromech. Microeng., 16, pp. 390-401.
    • (2006) J. Micromech. Microeng. , vol.16 , pp. 390-401
    • Lenci, S.1    Rega, G.2
  • 49
    • 33748752405 scopus 로고    scopus 로고
    • Nano-Chemo-Mechanical Sensor Array Platform for High-Throughput Chemical Analysis
    • Lim, S., Raorane, D., Satyanarayana, S., and Majumdar, A., 2006, "Nano-Chemo-Mechanical Sensor Array Platform for High-Throughput Chemical Analysis," Sens. Actuators B, 119, pp. 466-474.
    • (2006) Sens. Actuators B , vol.119 , pp. 466-474
    • Lim, S.1    Raorane, D.2    Satyanarayana, S.3    Majumdar, A.4
  • 51
    • 0037284599 scopus 로고    scopus 로고
    • A Study of the Nonlinear Response of a Resonant Microbeam to an Electric Actuation
    • Younis, M. I., and Nayfeh, A. H., 2003, "A Study of the Nonlinear Response of a Resonant Microbeam to an Electric Actuation," Nonlinear Dyn., 31, pp. 91-117.
    • (2003) Nonlinear Dyn , vol.31 , pp. 91-117
    • Younis, M.I.1    Nayfeh, A.H.2
  • 52
    • 77955291766 scopus 로고    scopus 로고
    • www.sensata.com.
  • 53
    • 0020834077 scopus 로고
    • On Isothermal Squeeze Films
    • Blech, J. J., 1983, "On Isothermal Squeeze Films," ASME J. Lubr. Technol., 105, pp. 615-620.
    • (1983) ASME J. Lubr. Technol. , vol.105 , pp. 615-620
    • Blech, J.J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.